Measurement and processing methods of micro-nano structures

Abstract

A measurement method and processing method of a micro-nano structure. The measurement method includes: obtaining a real-time microscopic image of the micro-nano structure, the micro-nano structure including at least one micro-nano unit; Fitting the graph; measuring the fitting graph to obtain the size and position information of at least one micro-nano unit. The measurement method of the micro-nano structure provided by the present invention obtains the real-time microscopic image of the micro-nano structure, and obtains the fitting figure most consistent with the outline of the micro-nano unit through identification and fitting, and the measurement fitting figure is equivalent to measuring The corresponding micro-nano unit can obtain the precise size and position information of the micro-nano unit. At the same time, because the measurement method can be performed during the processing, it is convenient for real-time monitoring of the micro-nano structure processing process, which is conducive to the high precision of the micro-nano structure. processing.

Description

technical field [0001] The art belongs to the field of precision machining, and in particular relates to a high-precision machining method for micro-nano structures. Background technique [0002] In recent years, micro-nano machining, as an emerging precision machining technology, has been highly valued by people in the field, and it has revolutionary significance for industries that require high precision, such as medical treatment and semiconductors. [0003] In the existing micro-nano processing scheme, generally on the computer of the processing equipment, the simple drawing software provided by the equipment manufacturer is used to design the corresponding pattern for the pre-processed micro-nano structure, and then the processing program is executed until the processing is completed. In this process, due to the instability of energy sources such as ion sources, even if the same parameters are used for micro-nano processing, the size and position of the processed micro-...

AI Technical Summary

Problems solved by technology

In this process, due to the instability of energy sources such as ion sources, even if the same parameters are used for micro-nano processing, the size and position of the processed micro-nano structures will change to a certain extent, and because the micro-nano structures are more complex and Its size is on the nanoscale, making it difficult to measure its precise size

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