A Variable Resolution Phase Unwrapping Method Based on Point Diffraction Interferometer

Abstract

The invention discloses a variable resolution phase unwrapping method based on a point diffraction interferometer, which generates and actually collects network model training and verification data with the interferometer; establishes a training / verification data set after wrapping processing, and adopts four steps The phase method extracts the phase data of the interferogram; establishes a convolutional self-encoding neural network model, inputs the training data into the model, trains the network through multiple iterations to the optimal state, and then predicts the data to be processed collected by the instrument; The package phase map is divided into regions with high efficiency, and the full-scale unpacking is carried out through the subsequent splicing strategy; based on the original package phase, data jump points are extracted to obtain the package area outline, which is inserted into the initial prediction results and denoised in units of regions. The results are optimized to improve the accuracy of unpacking; the Iterative Closest Point algorithm is used to stitch multiple sets of adjacent phase data to achieve adjustable resolution. High unpacking accuracy, strong versatility, and strong real-time processing capabilities.

Description

technical field [0001] The invention belongs to the technical field of phase data processing in the field of laser interference precision measurement, and in particular relates to a variable resolution phase unwrapping method based on a point diffraction interferometer. Background technique [0002] During the manufacturing process of spherical / aspherical optical elements, it needs to go through multiple production process steps, including grinding stage, rough polishing stage and fine polishing stage. In the early stage of production, grinding is often used for processing, and the contour method is used for detection; while in the fine polishing stage, in order to avoid low contact measurement accuracy and easy scratches on the optical surface, interferometry is often used for measurement. This is a non-destructive testing method and the accuracy can reach submicron or even nanometer level. [0003] Point-diffraction interferometry is a typical interferometry method. The i...

AI Technical Summary

Problems solved by technology

The expansion result of this method has better continuity and smoothness, but the local error is easy to spread to the global

The current neural network-based method to achieve data unpacking processing can obtain high unpacking accuracy, but the output result of this type of method is static resolution, the versatility is not strong, and the detail resolution is low

Images