High-accuracy laminated optical grating unit and preparation method

Abstract

The invention provides a high-accuracy laminated optical grating unit and a preparation method, and aims to solve the problem that the existing optical grating unit is relatively low in optical grating laminating accuracy and cannot meet the lamination accuracy requirement of + / -3[mu]m. The optical grating unit comprises a plurality of single optical gratings which are laminated from top to bottomin sequence, wherein each single optical grating is provided with two rectangular positioning holes; the positioning holes of the single optical gratings are overlaid; the length directions of the rectangular positioning holes are parallel to the length directions of slits of the single optical gratings; every two rectangular positioning holes are positioned in the peripheral areas of the slits,and are formed in an axially symmetrical way; and symmetry axes pass through the centers of the single optical gratings and are vertical to the slits. The preparation method comprises the following steps of 1) performing optical grating slit processing on optical gratings by adopting a laser processing process, and meanwhile processing rectangular positioning holes in the optical gratings with theprocessing process as the optical grating slits; 2) processing a plurality of optical gratings under the same process conditions as the step 1) to obtain a plurality of single optical gratings; and 3) laminating the optical gratings by taking the rectangular positioning holes of the single optical gratings as mechanical references to obtain the optical grating unit.

Description

Technical field [0001] The invention relates to a grating unit and a preparation method, in particular to a high-precision laminated grating unit and a preparation method. Background technique [0002] The grating is an important structure for hard X-ray detection. The collimator based on the dual grating detection principle can complete the modulation of the hard X-ray photon transmittance, and then detect solar flares and other non-thermal physical processes. Currently limited by the level of high-precision grating processing technology, the development of gratings for hard X-ray detection requires stacking 20 single-layer grating sheets with a thickness of 0.1 mm into independent grating units. In order to complete the development of the grating unit, it is necessary to first process a single grating with a corresponding pitch on a high-precision grating sheet. After the processing is completed, the single grating is laminated according to a specific process, and it is ensured...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the technical problem that the grating lamination precision of the existing grating unit is low and it is difficult to meet the lamination precision requirement of ±3μm, the present invention provides a high-precision lamination grating unit and its preparation method

Images