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Two-terminal type non-linear element manufacturing method thereofand liquid crystal display panel

A technology of nonlinear components and signal lines, which is applied in the field of two-terminal nonlinear components and its manufacture and liquid crystal display, and can solve problems such as insufficient margin

Inactive Publication Date: 2003-08-06
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in this technology, there is still a problem of insufficient margin for desired applications that require contrast characteristics at high temperatures

Method used

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  • Two-terminal type non-linear element manufacturing method thereofand liquid crystal display panel
  • Two-terminal type non-linear element manufacturing method thereofand liquid crystal display panel
  • Two-terminal type non-linear element manufacturing method thereofand liquid crystal display panel

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0077] In this example, the Figure 13And the MIM type nonlinear element with back-to-back structure shown in Fig. 14 . Specifically, a tantalum film (containing 0.2 (atomic) % tungsten) with a film thickness of 150 nm was deposited on the substrate by sputtering, and then patterned to form the first conductive film. Next, in a nitrogen atmosphere, the Heat treatment (pre-annealing) was performed at 350° C. for 30 minutes. Next, use 0.05 (weight)% citric acid aqueous solution as forming liquid, with current density being 0.04mA / cm 2 , The voltage reaches 15V to carry out constant current electrolysis, and carry out the anodic oxidation of the above-mentioned tantalum film. As a result, a tantalum oxide film with a thickness of about 30 nm was formed.

[0078] Furthermore, in a nitrogen atmosphere, at 320° C. for 30 minutes, after performing heat treatment for 30 minutes, cooling in an air atmosphere; Chromium with a film thickness of 100nm; further, patterning to form a se...

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PUM

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Abstract

The invention provides an MIM type non-linear element with little time-dependent change, an LCD display screen adopting the element, and a manufacturing method of the element. The element includes a first conductive film, an insulating film and a second conductive film. In the SIMS element analysis, the thickness of the hydrogen spectrum in the depth direction is over 10nm when the spectrum is at the strength 1 level lower than the peak strength. In the thermal desorption spectrum, the peak temperature of the hydrogen spectrum is above 300 DEG C. The method of manufacturing the element includes the steps, such as forming the first conductive film, thermal treatment under more than 300 DEG C, forming the insulating film, forming the second conductive film, etc.

Description

technical field [0001] The invention relates to a two-terminal nonlinear element used on a switch element, a manufacturing method of the two-terminal nonlinear element, and a liquid crystal display using the above-mentioned two-terminal nonlinear element. Background technique [0002] The active matrix liquid crystal display device fills liquid crystals between the active matrix substrate (switching elements are arranged on each pixel area to form a matrix array) and the opposite substrate on which a color filter is placed, to control the color of each pixel area. The alignment state of the liquid crystal displays given image information. As the switching element, generally, a three-terminal element such as a thin film transistor (FIF) or a two-terminal element such as a metal-insulator-metal (MIM element) nonlinear element (hereinafter referred to as "MIM element") can be used. Furthermore, compared with the case where a three-terminal element is used, the switching elemen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/136G02F1/1365H01L45/00H01L49/02
CPCG02F1/1365H01L45/00H10N70/00H01L27/124
Inventor 井上孝高野靖直野秀昭伊藤涉浅川勉宇敷武义
Owner SEIKO EPSON CORP