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Nested ring microelectromechanical vibrating gyroscope with meandering flexible rings

A technology of vibrating gyroscopes and flexible rings, which is applied in the direction of gyroscope effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., which can solve the problems of low nonlinear threshold displacement, quality factor and driving displacement to be improved, and achieve the movement range The effect of increasing the value, improving the Q value, and securing performance stability

Active Publication Date: 2022-05-10
NAT UNIV OF DEFENSE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0014] The current traditional nested ring microelectromechanical vibratory gyroscope has high stiffness and low nonlinear threshold displacement, which leads to its quality factor and drive displacement still need to be improved

Method used

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  • Nested ring microelectromechanical vibrating gyroscope with meandering flexible rings
  • Nested ring microelectromechanical vibrating gyroscope with meandering flexible rings
  • Nested ring microelectromechanical vibrating gyroscope with meandering flexible rings

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Experimental program
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Effect test

Embodiment 1

[0043] A nested ring microelectromechanical vibrating gyroscope with a meandering flexible ring in the invention, its overall structure is as follows figure 1 As shown, the cross-sectional view can be obtained by cutting at the A-A position as figure 2 As shown, it includes a micro-electromechanical vibrating gyro body, and the micro-electromechanical vibrating gyro body includes a resonant structure 3, and the resonant structure 3 includes an anchor point 1, a meandering flexible ring and spokes 2, and a plurality of anchor points are arranged on the outside of the anchor point 1. Point 1 is the center of the circular structure of meandering flexible rings that are nested sequentially. Between adjacent meandering flexible rings and between the innermost meandering flexible ring and anchor point 1, there are multiple spoke-like spokes that are evenly distributed. 2 are connected, and the parts divided by two adjacent spokes 2 on each meandering flexible ring are curved beams ...

Embodiment 2

[0060] In order to compare the improvement of the performance parameters of the nested ring microelectromechanical vibrating gyroscope with meandering flexible rings, a traditional nested ring gyroscope with a simple ring with the same geometric parameters (as shown in Table 1) was additionally fabricated. Resonant structures such as Figure 12 shown.

[0061]Using finite element simulation software, the nested ring MEMS vibrating gyroscope with meandering flexible rings and the traditional nested ring gyroscope with simple rings in the first embodiment are used for dynamic simulation analysis and numerical calculation of performance parameters, so that two kinds of vibration gyroscopes can be obtained. The relevant performance parameters of the gyroscope are shown in Table 2.

[0062] Table 2 Comparison of nested ring gyroscopes with meandering flexible rings and traditional nested ring gyroscopes with simple rings

[0063]

[0064]

[0065] further, Figure 9 The si...

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Abstract

The present invention provides a nested-ring micro-electromechanical vibrating gyroscope with meandering flexible rings, which includes a micro-electro-mechanical vibrating gyroscope body, the micro-electromechanical vibrating gyroscope body includes a resonant structure, and the resonant structure includes an anchor point, a meandering flexible ring and spokes, The outer side of the anchor point is provided with a plurality of meandering flexible rings in a circular structure nested in turn around the anchor point, and the adjacent meandering flexible rings and between the innermost meandering flexible ring and the anchor point are passed The spoke-like spokes that are evenly distributed are connected, and the part divided by two adjacent spokes on each curved flexible ring is a curved beam folded by a curve. Compared with the traditional nested ring gyroscope, the nested ring micro-electromechanical vibrating gyroscope of the meandering flexible ring provided by the present invention can realize higher thermoelastic quality factor and larger driving displacement, and has higher sensitivity and lower Mechanical thermal noise.

Description

technical field [0001] The invention relates to gyroscope technology and the utilization of micro-electromechanical processing technology, and mainly relates to a nested ring micro-gyroscope adopting a novel meandering flexible ring. Background technique [0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space. It is the core device in the fields of motion measurement, inertial navigation, guidance and control, etc. Micro-electromechanical gyroscopes based on the Coriolis effect have the advantages of small size, low power consumption, and high cost performance. Improving the accuracy of micro-electromechanical gyroscopes is an important research direction in the industry. Nested ring MEMS vibratory gyroscope is a typical high-performance solution. [0003] The mechanical sensitivity directly determines the effective signal strength of the gyroscope, and mechanical thermal noise is an important source of gyroscope ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5656
CPCG01C19/56
Inventor 周鑫肖定邦吴学忠李兰张勇猛李青松
Owner NAT UNIV OF DEFENSE TECH
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