Nested ring microelectromechanical vibrating gyroscope with meandering flexible rings
A technology of vibrating gyroscopes and flexible rings, which is applied in the direction of gyroscope effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., which can solve the problems of low nonlinear threshold displacement, quality factor and driving displacement to be improved, and achieve the movement range The effect of increasing the value, improving the Q value, and securing performance stability
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Embodiment 1
[0043] A nested ring microelectromechanical vibrating gyroscope with a meandering flexible ring in the invention, its overall structure is as follows figure 1 As shown, the cross-sectional view can be obtained by cutting at the A-A position as figure 2 As shown, it includes a micro-electromechanical vibrating gyro body, and the micro-electromechanical vibrating gyro body includes a resonant structure 3, and the resonant structure 3 includes an anchor point 1, a meandering flexible ring and spokes 2, and a plurality of anchor points are arranged on the outside of the anchor point 1. Point 1 is the center of the circular structure of meandering flexible rings that are nested sequentially. Between adjacent meandering flexible rings and between the innermost meandering flexible ring and anchor point 1, there are multiple spoke-like spokes that are evenly distributed. 2 are connected, and the parts divided by two adjacent spokes 2 on each meandering flexible ring are curved beams ...
Embodiment 2
[0060] In order to compare the improvement of the performance parameters of the nested ring microelectromechanical vibrating gyroscope with meandering flexible rings, a traditional nested ring gyroscope with a simple ring with the same geometric parameters (as shown in Table 1) was additionally fabricated. Resonant structures such as Figure 12 shown.
[0061]Using finite element simulation software, the nested ring MEMS vibrating gyroscope with meandering flexible rings and the traditional nested ring gyroscope with simple rings in the first embodiment are used for dynamic simulation analysis and numerical calculation of performance parameters, so that two kinds of vibration gyroscopes can be obtained. The relevant performance parameters of the gyroscope are shown in Table 2.
[0062] Table 2 Comparison of nested ring gyroscopes with meandering flexible rings and traditional nested ring gyroscopes with simple rings
[0063]
[0064]
[0065] further, Figure 9 The si...
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