Light intensity and ozone concentration control device for excimer lamps
A technology of excimer lamps and control devices, which is applied in the direction of non-electric variable control, control/regulation system, and simultaneous control of multiple variables, which can solve the problems of non-existent control of ozone concentration
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[0015] The present invention will be further described below in conjunction with accompanying drawing, and the structure and principle of the present invention are very clear to those skilled in the art. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0016] The present invention adopts 172nm excimer lamp, and concrete reaction equation is as follows:
[0017] 1.O 2 →O 3 →O 2+ ;
[0018] 2.C x h y o z →C m h n o k (x>m,y>n,z>k);
[0019] In summary: C m h n o k +O 2+ / O 3 →CO 2 +H 2 O+CO.
[0020] It can be seen from the above that the change of ozone concentration has a significant impact on the effect of the excimer lamp.
[0021] The principle is as follows: After ultraviolet rays irradiate the solid surface, the organic molecules of the pollutants on the surface are cut off by the strong light energy, oxidized, and then decomposed into volatile sub...
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