Clamping device for quartz wafer coating
A quartz wafer and clamping block technology is applied in the field of clamping devices for quartz wafer coating, which can solve the problems of poor stability and friction marks of quartz wafers, and achieve the effect of improving friction force, improving clamping stability and ensuring completeness.
Pending Publication Date: 2020-11-10
马鞍山荣泰科技有限公司
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Problems solved by technology
[0005] The purpose of the present invention is to provide a clamping device for quartz wafer coating, thereby solving the problem that the clamping device for quartz wafer coating in the prior art has poor stability in clamping the quartz wafer, and it will cause the quartz wafer to be clamped. Problems with visible rubbing marks
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[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0024] see Figure 1-3 , a clamping device for quartz wafer coating, comprising a driving mechanism 1 and a clamping mechanism 2, the clamping mechanism 2 is installed on the lower end of the driving mechanism 1, and the driving mechanism 1 includes a mounting part 11, a small servo motor 12, a transmission rod 13 and screw mandrel 14, the upper end of described mount 11 is connected with the upper end of small servo motor 12, the upper end of transmission rod...
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The invention discloses a clamping device for quartz wafer coating. The clamping device comprises a driving mechanism and a clamping mechanism, a clamping block is semicircular, a semicircular clamping groove is formed in one side of the upper end of the clamping block, and the overlooking tangent plane of the clamping groove is equal to the overlooking tangent plane of one side of the quartz wafer, so that the contact area between the clamping groove and one side of the quartz wafer can be increased; further a friction force between the clamping groove and the quartz wafer is increased, and finally the clamping stability of the quartz wafer is improved. The protective pads are arranged in the clamping grooves, the opposite faces of the two protective pads are sunken inwards, the protective pads are components made of silica gel materials and matched with the semicircular clamping grooves, and the clamping stability of the quartz wafer can be further improved. And the silica gel is high in softness, so that the quartz wafer is necessarily damaged in the clamping process, and the integrity of the quartz wafer is ensured.
Description
technical field [0001] The invention relates to the technical field of quartz wafer processing equipment, in particular to a clamping device for quartz wafer coating. Background technique [0002] The chemical composition of quartz crystal is SiO2, and the crystal belongs to the oxide mineral of trigonal crystal system, that is, low-temperature quartz (a-quartz), which is the most widely distributed mineral species in the quartz group minerals. Quartz in a broad sense also includes high-temperature quartz (b-quartz). During the processing of quartz crystals, sheet coating treatment is required. During coating, the quartz crystals need to be clamped to the maximum to be placed in the groove, which requires a practical clamping device for clamping. Take and place. [0003] The current clamping device for quartz wafer coating has poor stability in clamping the quartz wafer, and will cause obvious friction marks on the clamped end of the quartz wafer. [0004] In order to solv...
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IPC IPC(8): H03H3/02
CPCH03H3/02
Inventor 李直荣温从众李直权
Owner 马鞍山荣泰科技有限公司