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Supercritical fluid cleaning method and device thereof

A supercritical fluid and cleaning device technology, applied in the field of precision parts cleaning, can solve the problems of environmental pollution, poor cleaning effect, low cleaning efficiency, etc., and achieve the effects of significant environmental benefits, improved cleaning speed, and improved cleaning efficiency.

Pending Publication Date: 2020-11-24
SHANGHAI FULUDI FLUID TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional cleaning method uses organic solvents such as Freon, trichloroethane, and trifluoromethylbenzene. There are two main problems: one is that the cleaning effect is not good and cannot meet the requirements. Good, it will affect the uniformity and appearance quality of the infiltrated layer; second, the environmental pollution is serious, which is harmful to the human health of the operator, and the direct discharge of solvents has great potential safety hazards and serious environmental pollution. It has been banned or restricted in China.
[0008] Although the above-mentioned published patents US09662686B2, CN106733945A, CN101190438A and CN101740337A all disclose technical solutions for cleaning precision workpieces, electronic components or semiconductors by using supercritical fluid as a cleaning agent, they generally have poor cleaning effects, low cleaning efficiency, and Defects with high cleaning costs

Method used

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  • Supercritical fluid cleaning method and device thereof
  • Supercritical fluid cleaning method and device thereof
  • Supercritical fluid cleaning method and device thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] This embodiment provides a supercritical fluid cleaning method, using supercritical fluid as a cleaning agent, utilizing the characteristic that the density of supercritical fluid changes sharply near the critical point, and by alternately changing the fluid pressure, repeated formation of Cavities or air bubbles are used to remove pollutants from the surface of the workpiece and achieve the purpose of cleaning. The relatively high solubility of supercritical fluid is conducive to the dissolution of pollutants into superfluid, the surface tension of supercritical fluid is close to zero, which is conducive to cleaning pollutants in small spaces, and the high diffusion coefficient of supercritical fluid is conducive to the separation of pollutants and fluids. The mass transfer between them increases the cleaning rate.

[0057] The supercritical fluid cleaning method provided in this embodiment is used to remove pollutants on the surface of precision parts. The precision d...

Embodiment 2

[0063] This embodiment provides a supercritical fluid cleaning method, which uses supercritical fluid as a cleaning agent, and utilizes the characteristic that the density of supercritical fluid changes drastically with temperature near the critical point. Cavities or bubbles are formed to remove pollutants from the surface of the workpiece and achieve the purpose of cleaning. The relatively high dissolving capacity of supercritical fluid is conducive to the dissolution of pollutants into superfluid, and the surface tension of supercritical fluid is close to zero, which is conducive to cleaning pollutants in narrow spaces, which solves the problem that traditional cleaning agents cannot Enter these narrow spaces to effectively clean the pollutants, and the high diffusion coefficient of the supercritical fluid is conducive to the mass transfer between the pollutants and the fluid to improve the cleaning rate.

[0064] The supercritical fluid cleaning method provided in this emb...

Embodiment 3

[0070] see figure 1 As shown, the present embodiment provides a supercritical fluid cleaning device for cleaning precision parts, and the precision devices include devices in IT manufacturing and MEMS manufacturing, which are characterized in that the size of the device is small, with narrow and small gaps, gaps The pollutants inside are not easy to clean. Utilizing the characteristic that the density of the supercritical fluid changes drastically near the critical point, the pressure of the supercritical fluid can be changed by adopting a special cleaning chamber structure design and using the different cross-sectional sizes of adjacent cleaning chambers. When the pressure increases The supercritical fluid is diffused into the pollutants, and bubbles are formed in the pollutants when the pressure drops, and the cycle is repeated continuously, so that the pollutants are separated from the workpiece to achieve the purpose of cleaning. The relatively high dissolving capacity of...

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Abstract

The invention discloses a supercritical fluid cleaning method and a device thereof. The supercritical fluid cleaning method comprises the following steps: continuously feeding supercritical fluid in acleaning room; alternately changing the pressure of the cleaning room or the temperature of a workpiece to enable pollutants to be separated from the surface of the workpiece; and discharging the pollutants separated from the workpiece along with the supercritical fluid to finish cleaning the workpiece. A supercritical fluid cleaning device comprises a fluid storage tank and a cleaning room; thefluid storage tank provides a fluid source and converts the fluid source into supercritical fluid; and the cleaning room is connected with the fluid storage tank, can be fed with or discharge supercritical fluid and is composed of at least two cleaning cavities with different cross section areas. According to the supercritical fluid cleaning method and the device thereof, holes or bubbles are repeatedly formed in the pollutants through alternately changing the pressure of the cleaning room or the temperature of the workpiece and constantly and repeatedly circulate, so that the purpose that thepollutants are separated from the workpiece surface to realize cleaning is realized; and high diffusion coefficient of the supercritical fluid facilitates mass transfer between the pollutants and thefluid to greatly increase the cleaning rate.

Description

technical field [0001] The invention relates to the technical field of cleaning precision parts, in particular to a supercritical fluid cleaning method and a device thereof. Background technique [0002] In precision manufacturing, there is a cleaning process of workpieces, such as precision cleaning of oil and impurities in complex grooves, blind holes, threaded holes, and deep holes of precision electronic components, metal processing parts and other parts. The traditional cleaning method uses organic solvents such as freon, trichloroethane, and trifluoromethylbenzene. There are two main problems: one is that the cleaning effect is not good and cannot meet the requirements, such as the cleaning before nitriding and nitrocarburizing is not enough Well, it will affect the uniformity and appearance quality of the infiltrated layer; second, the environmental pollution is serious, which is harmful to the human health of the operator, and the direct discharge of solvents has a g...

Claims

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Application Information

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IPC IPC(8): B08B7/00B08B13/00
CPCB08B7/0021B08B7/0071B08B13/00
Inventor 杨景峰李卫平杨凡
Owner SHANGHAI FULUDI FLUID TECH CO LTD