Rotating electrode device with holes and electrochemical testing system

Abstract

The invention belongs to the technical field of electrode testing, and discloses a rotating electrode device with holes and an electrochemical testing system. A disc electrode and a circular ring electrode are arranged on the upper side of an integrated polytetrafluoroethylene supporting body, and the circular ring electrode is arranged on the outer side of the disc electrode; polytetrafluoroethylene layers are arranged between the disc electrode and the circular ring electrode and on the outer side of the circular ring electrode; a first noble metal platinum layer is arranged on the upper side of the disc electrode; a polytetrafluoroethylene film with a through hole is arranged on the upper side of the first noble metal platinum layer; a second precious metal platinum layer is arranged onthe upper side of the circular ring electrode; a plurality of through holes are formed in the polytetrafluoroethylene film with the through holes; the diameters of the through holes are 10 [mu] m and100 [mu] m. The height of the disc electrode is 100 microns lower than that of the circular ring electrode, and the upper side of the polytetrafluoroethylene film with the through hole is flush withthe circular ring electrode. According to the invention, the conditions of a hole bottom and a copper surface during electroplating can be simulated at the same time, the test accuracy can be improved, and the system error is reduced.

Description

technical field [0001] The invention belongs to the technical field of electrode testing, in particular to a rotating electrode device with holes and an electrochemical testing system. Background technique [0002] At present, the Rotating Ring Disk Electrode (RRDE) is an ideal electrochemical test instrument, which plays an important role in the study of various mechanisms of electrochemical reactions. RRDE is an electrode with controllable rotation speed. Rotating at different rotation speeds in the reaction solution can simulate the convective diffusion rate of the solute in the reaction solution, that is, RRDE makes the diffusion controllable. Therefore, in the current electrochemical research, RRDE is one of the more widely used electrodes. In the electrochemical research of electroplating copper hole filling, it is necessary to measure the electrochemical behavior of the electroplating additives on the copper surface and the bottom of the hole separately, so as to jud...

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Problems solved by technology

Since it is the experimental result measured by two electroplating solution systems, there must be a certain systematic error in the experimental data

In addition, performing two electrochemical tests in order to obtain suitable data will increase the time cost

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