Material clamping device of track trolley

Abstract

The invention discloses a material clamping device of a track trolley. The material clamping device of the track trolley comprises a shell, a first sensor, a second sensor, a third sensor, a fourth sensor, a cylinder, a top plate, a first blocking sheet, a left clamping plate, a right clamping plate, a second blocking sheet, a travel switch and a cone. According to the material clamping device ofthe track trolley, effective safety protection measures are provided, and the movement of the FOUP can be limited from all directions after clamping; The mode that the left clamping plate and the right clamping plate move in the opposite directions is adopted, the top plate is located below the mushroom head and above the mushroom head; and moreover, the top plate makes close contact with the mushroom head all the time under the action of spring force, so that the problem of not tight clamping is solved; and the spring force is accurately calculated and tested, so that the FOUP cannot be damaged while it is guaranteed that the FOUP is reliably clamped. Therefore, the problem of over-tight clamping is avoided. The problems that clamping is too tight, clamping deviation is likely to happen,falling is likely to happen, and the position is wrong and cannot be recognized in the FOUP clamping and transferring process of an FOUP clamping device in the prior art are solved.

Description

technical field [0001] The invention belongs to the field of semiconductor production, and in particular relates to a material clamping device for a rail trolley. Background technique [0002] Today, with highly developed semiconductor manufacturing technology, 300mm semiconductor factories have become the mainstream of the global semiconductor industry. Due to the huge investment in the 300mm semiconductor production line, people have to tap the production efficiency of the 300mm factory as much as possible in order to obtain a larger wafer output. A powerful and stable Automatic MaterialHandling System (AMHS - automatic material handling system) plays a very important role in the 300mm factory. [0003] The Chinese translation of AMHS system is automatic material handling system. The handling system has a wide range of applications, including cargo transportation at airports, material transportation in automated factories, etc. Among them, the most successful field of a...

AI Technical Summary

Problems solved by technology

[0009] Aiming at the deficiencies of the prior art, the purpose of the present invention is to provide a material clamping device for rail trolleys, which solves the problem of excessive clamping and clamping deviation in the process of clamping and transporting FOUPs in the prior art by the FOUP clamping device , easy to fall off and the wrong position can not be identified

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