Unlock instant, AI-driven research and patent intelligence for your innovation.

A driving structure for AM probe card

A drive structure and probe card technology, applied in the field of probe cards, can solve the problems of incapability of automatic amplitude modulation and the inability of probe cards to be universal, and achieve the effect of reducing vibration

Active Publication Date: 2021-05-11
MAXONE SEMICON CO LTD
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the production process of semiconductor devices, it is necessary to visit a large number of circuit contacts in one or more devices multiple times, and move the probe card through the moving mechanism to make the probes contact with the contacts. At the same time, to match the detection process For multiple sets of contacts in the probe card, multiple probe cards need to be set, and the probe card is fixed by the holder. The holder is a polyhedron that can rotate. By setting one or more probe cards on each surface, or setting Multiple movable platforms move the probe card to realize the matching between the probe card and different contact groups. The matching is realized by exchanging the probe card. A single probe card cannot be used universally and cannot be automatically adjusted.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A driving structure for AM probe card
  • A driving structure for AM probe card
  • A driving structure for AM probe card

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0067] This embodiment is an embodiment of an amplitude modulation probe card.

[0068] combine figure 1 As shown, an amplitude modulation probe card includes a probe 1, a probe board 2, a circuit board 3 and an amplitude modulation structure 4, the probe 1 is fixedly arranged on the probe board 2, and one end of the probe 1 is connected to To the circuit board 3, the other end of the probe 1 is clamped on the amplitude modulation structure 4, and the end of the probe 1 is in contact with the contact of the semiconductor device, and the electrical signal is transmitted to the circuit board 3 through the probe 1, and is transmitted by the circuit The board 3 is transmitted to the tester for detection, and the amplitude modulation structure 4 is connected to the detection end of the probe 1. When the amplitude modulation structure 4 adjusts the height of the probe 1, different numbers of probes 1 can be located at lower detection positions. And participate in the detection, the...

Embodiment 2

[0083] This embodiment is an embodiment of a driving structure for an amplitude modulation probe card.

[0084] This embodiment discloses a driving structure for an amplitude modulation probe card, and the driving structure is applied to the amplitude modulation probe card disclosed in the first embodiment.

[0085] combine Image 6 with Figure 7 As shown, the drive structure 6 is arranged above the probe card, the drive structure 6 includes a drive cylinder 6-1 and a limit cylinder 6-2, the drive cylinder 6-1 is used to drive the amplitude modulation structure 4, A plurality of the limiting cylinders 6-2 are sequentially arranged on the stroke of the driving cylinder 6-1 for limiting the stroke of the driving cylinder 6-1.

[0086] In this embodiment, the stroke of the driving cylinder 6-1 corresponds to the angle at which the amplitude modulation shaft 4-6 of the amplitude modulation probe card rotates. image 3 with Figure 4 As shown, the radian value of the amplitude...

Embodiment 3

[0099] This embodiment is an embodiment of a buffer structure for an AM probe card.

[0100] The buffer structure for the amplitude modulation probe card disclosed in this embodiment is applied to the driving structure for the amplitude modulation probe card disclosed in the second embodiment, which can reduce the vibration generated by the driving structure.

[0101] combine Figure 8 As shown, it is arranged on the driving structure 6, and the driving structure 6 includes: a driving cylinder 6-1, a limiting cylinder 6-2, a driving cylinder slider 6-3 and a limiting cylinder slider 6-5, and the buffer structure is connected in series Between the cylinder and the slider, the vibration of the cylinder is disconnected from the slider. After the vibration is filtered out, it does not affect the push of the slider.

[0102] The buffer structure includes: a buffer pallet 7-1 and a buffer pad 7-2, the buffer pallet 7-1 is provided with several buffer pads 7-2, the driving cylinder ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention belongs to the technical field of probe cards, and in particular relates to a drive structure for an amplitude modulation probe card, wherein the drive structure is arranged above the probe card, and the drive structure includes a drive cylinder and a limit cylinder. In order to drive the amplitude modulation structure, a plurality of the limiting cylinders are sequentially arranged on the stroke of the driving cylinder to limit the stroke of the driving cylinder, and the limiting cylinder is arranged in the stroke of the extending end of the driving cylinder. , so that the driving cylinder has multiple gears when driving the amplitude modulation, each gear corresponds to the eccentric roller of the amplitude modulation probe card, while realizing the automatic amplitude modulation, the probe after the amplitude modulation can be fixed, and there is no Electromagnetic interference will occur.

Description

technical field [0001] The invention belongs to the technical field of probe cards, in particular to a driving structure for amplitude modulation probe cards. Background technique [0002] With the development of the semiconductor industry, more and more electronic devices are connected to the semiconductor wafer. During the manufacturing process of the semiconductor device, the probe is contacted with the metal end on the semiconductor wafer to realize a temporary electrical connection. The electrical signal of the tester is transmitted to the semiconductor device through the probe, and the tester detects the electronic device on the semiconductor wafer through the returned electrical signal. [0003] The probe card is the link between the semiconductor wafer and the tester. By integrating multiple probes on the probe card, multiple probes can be simultaneously contacted with multiple semiconductor devices on the semiconductor wafer to improve detection efficiency. . [0...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/28G01R1/073
CPCG01R1/07314G01R31/2887
Inventor 王艾琳赵梁玉
Owner MAXONE SEMICON CO LTD