A ring-shaped three-axis decoupling micro-gyroscope

Abstract

The invention discloses a structure of an annular three-axis decoupling silicon micro-gyroscope, which comprises an upper device structure layer, a lower glass substrate layer and a metal lead layer grown on the glass substrate layer. The device structure layer is a ring-shaped symmetrical structure. Including drive transmission frame, inner coupling ring, roll angle, pitch angle detection mass disk, and heading angle detection frame, among which, four drive transmission frames in the directions of 45°, 135°, 225°, and 315° are connected through the inner coupling ring, Realize equal-amplitude differential drive and differential detection; the inner coupling ring is connected to the three-axis detection part through an I-shaped decoupling beam, which realizes a better decoupling function between the drive and three-axis detection; the roll angle and pitch angle are detected by rolling The roll angle and pitch angle detection quality disk and the corresponding roll angle metal electrode film, the pitch angle metal electrode film constitute the roll angle and pitch angle detection part, and the heading angle detection part detects the heading angle through four sets of heading angle detection frames, which can achieve relatively Good detection performance.

Description

technical field [0001] The invention relates to a micro-electromechanical gyroscope, in particular to an annular three-axis decoupling micro-gyroscope. Background technique [0002] The micromechanical gyroscope is an inertial sensor used to measure angular rate and attitude angle. It has the advantages of small size, low power consumption, low cost, strong overload resistance, large dynamic range, and integration. It can also be embedded in intelligent In the control system, it is widely used in both the modern military field and the civilian consumer field. High-precision MEMS gyroscopes can be used in high-precision military products such as missiles and aerospace. A wide range of markets also put forward higher requirements for MEMS gyroscopes, and multi-axis integration is an important development direction of MEMS gyroscopes. [0003] In terms of three-axis gyroscope integration, it can be divided into three types. The first type can be assembled by horizontal axis gy...

AI Technical Summary

Problems solved by technology

Some companies and universities have also designed some single-chip integrated three-axis micro-gyroscopes, which can achieve angular rates in three directions, but due to the complexity of the structure and the coupling between structures, complete decoupling has not been achieved, making it difficult to To achieve better performance, therefore, in the design and manufacture of multi-axis micro gyroscopes, in addition to improving the processing technology, it is also necessary to optimize the structure and completely decouple to further improve its performance

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