A process for depositing silicon carbide coating on the surface of graphite parts
A technology of silicon carbide coating and surface deposition, which is applied in the field of deposition of silicon carbide coating on the surface of graphite parts, can solve the problems affecting the surface deposition effect of graphite parts and the influence of graphite surface, so as to reduce movement, reduce surface wear and improve deposition effect of effect
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Embodiment 1
[0042] like figure 1 Shown, a kind of graphite parts surface deposition silicon carbide coating process, comprises the following steps:
[0043] Step 1: remove impurities on the surface of the graphite parts, place the graphite parts on the storage table 12, then heat up the reaction kettle 11 and pass in a halogen gas to form metal halides with the impurities on the surface of the graphite parts, and then sublimate and discharge;
[0044] Step 2: Spray and clean. After Step 1, the sleeve 213 moves down vertically under the guidance of the switching device 4 and is covered on the storage table 12. At the same time, the bottom of the sleeve 213 drives the rotating disc 223 to rotate, spraying The shower mechanism 214 works, and the washing liquid flows into the liquid collection tank 226 through the sleeve 213 and the storage table 12 in sequence, and then the sleeve 213 moves up and rotates 90° under the guidance of the switching device 4;
[0045] Step 3: deposition reaction...
Embodiment 2
[0056] The present invention also provides a device for depositing silicon carbide on the surface of graphite parts:
[0057] like Figure 2 to Figure 8 Shown, a kind of equipment for depositing silicon carbide on the surface of graphite parts, including:
[0058] Deposition device 1, said deposition device 1 comprises a reaction kettle 11, a storage table 12 arranged at the middle position of the bottom surface of said reaction kettle 11, and a vacuum pumping pipeline 13 and a raw material gas pipeline 14 respectively pierced at the middle position of said storage platform 12 And nitrogen pipeline 15; Described reaction kettle 11 tube walls are also provided with chlorine passage 16;
[0059] The spraying device 2, the spraying device 2 includes a spraying assembly 21 that is slid up and down inside the reaction kettle 11 and can cover the storage table 12, and is installed on the storage table 12 and connected with the spraying assembly 21. The shower assembly 21 can be li...
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