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A process for depositing silicon carbide coating on the surface of graphite parts

A technology of silicon carbide coating and surface deposition, which is applied in the field of deposition of silicon carbide coating on the surface of graphite parts, can solve the problems affecting the surface deposition effect of graphite parts and the influence of graphite surface, so as to reduce movement, reduce surface wear and improve deposition effect of effect

Active Publication Date: 2022-05-20
SINOSTEEL NEW MATERIAL ZHEJIANG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the device is equipped with two stations to process the graphite, and the graphite workpiece is transferred between the two stations, so that the graphite is exposed to the air. During the transfer process, it is easy to affect the graphite surface, and then affect the deposition on the surface of the graphite workpiece. Effect

Method used

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  • A process for depositing silicon carbide coating on the surface of graphite parts
  • A process for depositing silicon carbide coating on the surface of graphite parts
  • A process for depositing silicon carbide coating on the surface of graphite parts

Examples

Experimental program
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Effect test

Embodiment 1

[0042] like figure 1 Shown, a kind of graphite parts surface deposition silicon carbide coating process, comprises the following steps:

[0043] Step 1: remove impurities on the surface of the graphite parts, place the graphite parts on the storage table 12, then heat up the reaction kettle 11 and pass in a halogen gas to form metal halides with the impurities on the surface of the graphite parts, and then sublimate and discharge;

[0044] Step 2: Spray and clean. After Step 1, the sleeve 213 moves down vertically under the guidance of the switching device 4 and is covered on the storage table 12. At the same time, the bottom of the sleeve 213 drives the rotating disc 223 to rotate, spraying The shower mechanism 214 works, and the washing liquid flows into the liquid collection tank 226 through the sleeve 213 and the storage table 12 in sequence, and then the sleeve 213 moves up and rotates 90° under the guidance of the switching device 4;

[0045] Step 3: deposition reaction...

Embodiment 2

[0056] The present invention also provides a device for depositing silicon carbide on the surface of graphite parts:

[0057] like Figure 2 to Figure 8 Shown, a kind of equipment for depositing silicon carbide on the surface of graphite parts, including:

[0058] Deposition device 1, said deposition device 1 comprises a reaction kettle 11, a storage table 12 arranged at the middle position of the bottom surface of said reaction kettle 11, and a vacuum pumping pipeline 13 and a raw material gas pipeline 14 respectively pierced at the middle position of said storage platform 12 And nitrogen pipeline 15; Described reaction kettle 11 tube walls are also provided with chlorine passage 16;

[0059] The spraying device 2, the spraying device 2 includes a spraying assembly 21 that is slid up and down inside the reaction kettle 11 and can cover the storage table 12, and is installed on the storage table 12 and connected with the spraying assembly 21. The shower assembly 21 can be li...

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Abstract

The invention provides a process for depositing a silicon carbide coating on the surface of a graphite piece, comprising the following steps: impurity removal on the surface of the graphite piece, spray cleaning, deposition reaction and cooling of the graphite piece. The liquid collection assembly and the spray assembly that can be placed on it are arranged on the top, and the cooling assembly that communicates with the liquid collection assembly is arranged around the spray assembly, and under the action of the switching device, the spray assembly and the cooling assembly Alternately work separately under the guidance of the guide, so that the impurity removal and surface deposition of graphite parts are completed in the same reaction kettle, which solves the problem that the surface deposition of graphite parts in the prior art needs to be carried out in two stations, resulting in the transfer of graphite parts. It is prone to wear and thus affect the technical problem of deposition effect.

Description

technical field [0001] The invention relates to the field of graphite handicraft production equipment, in particular to a process for depositing a silicon carbide coating on the surface of a graphite piece. Background technique [0002] Graphite is commonly known as "black gold". It has good chemical stability at room temperature and is not corroded by any strong acid, strong alkali and organic solvents. Therefore, graphite can be made into handicrafts, and the surface of graphite handicrafts is covered with a layer of silicon carbide coating. It can effectively protect the surface of graphite crafts. [0003] The invention patent with the Chinese patent application number CN201610802017.8 discloses a method for depositing silicon carbide on the surface of graphite parts, including the following steps: (1) Impurities removal on the graphite surface: firstly, the impurities on the surface of the graphite parts are removed by sublimation by forming metal halides ; (2) CVD dep...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B41/87C04B41/91
CPCC04B41/87C04B41/91C04B41/5059C04B41/5315C04B41/009C04B41/4531C04B35/522
Inventor 郭泰山林丽辉田斌
Owner SINOSTEEL NEW MATERIAL ZHEJIANG