Surface defect detection system and method

Abstract

The invention provides a surface defect detection system and method. The detection system comprises a detection platform, a steam spraying part, a light source part and an air knife part, wherein theinlet end of the detection platform is in butt joint with an output line of equipment in a previous process, and an outlet end is in butt joint with an input line of equipment in a next process, and atransmission roller group is mounted on the detection platform and is used for conveying a sample; the steam spraying part is positioned at the inlet end of the detection platform and is used for spraying steam to the sample to form a fog film on the surface of the sample; the light source part is used for providing irradiation light; and the air knife part is arranged at the upstream of the outlet end of the detection platform and is used for drying the sample. By utilizing the surface defect detection system, the substrate glass sample can be automatically obtained from the previous production process, the qualified sample can be automatically dried, and the dried sample can be automatically conveyed to the next production process for later use, so that the production cost and the safety risk are reduced.

Description

technical field [0001] The invention relates to defect detection technology, in particular to a surface defect detection system and detection method. Background technique [0002] Substrate glass is the raw material for the manufacture of electronic products, and the cleanliness of its surface affects the quality of electronic products. For example, the cleanliness of the glass process surface of the thin-film photovoltaic substrate affects the sputtering evaporation quality of the thin-film photovoltaic material. [0003] In order to ensure that the cleanliness of the substrate glass surface meets the requirements of subsequent processes, it is necessary to perform defect detection on the substrate glass surface. Defect detection can detect stains, oil films, scratches and other defects on the surface of the substrate glass in time, thus helping to prevent the substrate glass with unqualified surface cleanliness from entering the next production process. [0004] The exis...

AI Technical Summary

Problems solved by technology

[0004] The existing surface defect inspection system needs to take the substrate glass sample out of the production line and transport it to the designated inspection area for steam inspection. This handling process is time-consuming and labor-intensive, which is not conducive to reducing production costs and is likely to cause safety risks

Steam testing needs to spray steam onto the surface of the substrate glass sample to be tested. After the test is completed, the residual fog film on the surface of the substrate glass sample cannot be removed in time, so that qualified substrate glass samples cannot continue to be put into the next production process. End-of-life processing, further increasing production costs

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