Super-resolution laser printing device based on columnar vector polarized light

Abstract

The invention discloses a super-resolution laser printing device based on columnar vector polarized light, and belongs to the field of super-resolution laser micro-nano machining. A light beam outputby a direct-writing laser is collimated into a parallel light beam by a collimator after being subjected to intensity modulation by an acoustic optical modulator, and then the light beam is convertedinto tangential polarized light through a polarizer, a 1 / 2 wave plate and a vortex half-wave plate; a light beam output by a suppression laser is collimated into a parallel light beam by the collimator after being subjected to intensity modulation by the acoustic optical modulator, and then the parallel light beam is converted into radial polarized light through the polarizer, the 1 / 2 wave plate and the vortex half-wave plate; the two columnar vector polarized lights are respectively shaped into annular parallel light beams through two conical lenses in sequence; then the two beams of light are combined into one path of light which is focused by a high numerical aperture objective lens; the annular radial polarized light is focused into a solid light spot, and the annular tangential polarized light is focused into a hollow dark spot; the full widths at half maximum of the two light spots are smaller than that of the light spots formed by circularly polarized light under the same focusing condition, so that higher printing resolution can be obtained.

Description

technical field [0001] The invention belongs to the field of laser direct writing processing, in particular to a super-resolution laser printing device based on columnar vector polarized light. Background technique [0002] Two-photon laser printing technology is a direct-writing processing technology in the field of micro-nano processing. It is based on optical nonlinear effects and uses the two-photon absorption effect of matter under high-power excitation to greatly reduce the effective range of direct-writing spots. This improves the processing resolution. However, although the laser direct writing printing technology based on two-photon absorption theoretically breaks through the diffraction limit, it is still difficult for this technology to break through the sub-hundred nanometer resolution due to the relatively long wavelength used to stimulate the two-photon absorption effect. Rate. [0003] Although two-photon laser printing technology cannot achieve the resoluti...

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Problems solved by technology

However, although the laser direct writing printing technology based on two-photon absorption theoretically breaks through the diffraction limit, it is still difficult for this technology to break through the sub-hundred nanometer resolution due to the relatively long wavelength used to stimulate the two-photon absorption effect. Rate

[0003] Although two-photon laser printing technology cannot achieve the resolution of projection micro-nano processing technology, but because it also has technical advantages that other micro-nano processing technologies cannot match, two-photon laser printing technology still plays an important role in today's micro-nano processing field. status

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