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FBAR filter optimization method based on improved Mason model

An optimization method and filter technology, which is applied in the field of radio frequency filters, can solve problems such as cumbersome schematic diagrams, complex simulation circuit models, and insufficient inclusion of device thermal effects, and achieve simplified circuit design, reliable simulation results, and automatic tuning Effect

Pending Publication Date: 2021-01-29
广州市艾佛光通科技有限公司
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Problems solved by technology

[0005] However, most of the methods currently used to design FBAR filters only consider the electromagnetic simulation of the one-dimensional Mason equivalent circuit, and the thermal effect of the device cannot be fully included in the design floating standard.
Since the simulation circuit model of a single resonator is already complex enough, it will be more cumbersome to integrate into a high-order filter circuit schematic, so a simple and reliable simulation design mode is needed

Method used

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  • FBAR filter optimization method based on improved Mason model
  • FBAR filter optimization method based on improved Mason model
  • FBAR filter optimization method based on improved Mason model

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Embodiment 1

[0039] Such as figure 1 As shown, the FBAR filter optimization method based on the improved Mason model of the present embodiment includes the following steps:

[0040] (1) Select the physical field to be simulated and build a three-dimensional model of the FBAR piezoelectric oscillator in the Comsol Multiphysics software, such as figure 2 shown. The thickness of the lower electrode layer, the thickness of the piezoelectric layer, and the thickness of the upper electrode layer are respectively set to 26.44 nm, 2.02 μm, and 29.29 nm.

[0041] (2) Set the boundary conditions and formulas to be applied in the simulation. The temperature was set at 20° C. on the upper and lower electrode layers, and the upper electrode layer was in free contact with air.

[0042] (3) The three-dimensional model is constructed by meshing, and the thermal model is obtained by using the free subdivision method of tetrahedral mesh and simulation.

[0043] (4) According to the improved Mason model...

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Abstract

The invention discloses an FBAR filter optimization method based on an improved Mason model. An FBAR trapezoidal filter based on a Mason model is improved by applying electromagnetic-thermal joint simulation, and related components of ADS simulation software are mainly applied to tune and optimize the filter so as to meet index design requirements. According to the method, the actual working stateof the FBAR filter is simulated in a three-dimensional space by using the powerful operational capability of a computer, and the packaged two-port element is innovatively designed, so that the FBAR filter with a specific frequency can be designed, and related parameters of the FBAR filter can be adjusted; and a new thought is provided for obtaining performance indexes of the FBAR filter and researching a feedback mechanism of a device and a sound field thermal field theory.

Description

technical field [0001] The invention belongs to the technical field of optimization of radio frequency filters, BAW bulk acoustic wave filters, and thin film bulk acoustic wave resonators (FBAR), and particularly relates to a combination of comsol Multiphysics and ADS software, which improves Mason based on electromagnetic-thermal coupling multiphysics field simulation. An optimization method for the FBAR ladder filter model. Background technique [0002] The origin of the FBAR filter was in the 1960s. The original FBAR filter used quartz crystal as the piezoelectric material. The piezoelectric effect was weak, so the Q value of the device was low. It has been in the laboratory research and development stage for a long time and failed to be used in the industry. widely used. After decades of development, in 1999, the Ruby research group of Agilent Company prepared the FBAR device with good performance for the first time and further developed the FBAR duplexer based on this,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F30/398G06F119/08
CPCG06F30/398G06F2119/08
Inventor 李国强
Owner 广州市艾佛光通科技有限公司
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