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Polyhedral workpiece included angle change laser measurement method and device based on common-path difference

A technology of laser measurement and bulk workpiece, applied in measurement devices, optical devices, instruments, etc., can solve problems such as limiting the accuracy of angle measurement, increasing the cost and complexity of the measurement device, and measuring the stability of the mechanical structure of the measurement unit.

Active Publication Date: 2021-02-05
BEIJING JIAOTONG UNIV +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this method is: in the actual use process, piezoelectric ceramics are used to control the beam deflection, and the compensation effect is affected by the hysteresis characteristics, creep characteristics, temperature characteristics and driving circuits of piezoelectric ceramics, and piezoelectric ceramics control The response time of the system is at the ms level, and there is a certain lag. At the same time, the introduction of hardware parts will increase the cost and complexity of the measurement device
[0005] In addition, in the long-term measurement process, in addition to the light drift error, the circuit noise and the mechanical structure stability of the measurement unit will also introduce measurement errors
This error has not been compensated by the light drift compensation method in the prior art, which limits the angle measurement accuracy

Method used

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  • Polyhedral workpiece included angle change laser measurement method and device based on common-path difference
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  • Polyhedral workpiece included angle change laser measurement method and device based on common-path difference

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Experimental program
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Effect test

Embodiment 1

[0100] The processing process of the laser measurement method for the angle change of the polyhedron workpiece based on the common path difference provided by this embodiment includes the following steps:

[0101] Step 1. A beam of laser light emitted by the laser 1 through the optical fiber is expanded and collimated into a parallel beam by the collimator 4. After the parallel beam passes through the polarizer 6, two orthogonally polarized lights, S light and P light, and S light and P light are obtained. After the P light is transmitted by the beam splitter 7, it exits along the same trajectory;

[0102] After the S light and P light emitted along the same trajectory obtained in step 2 and step (1) are incident on the first polarizing beam splitter 13, the S light is reflected by the first polarizing beam splitter 13, and the P light is transmitted by the first polarizing beam splitter 13 ;

[0103] Step 3, the reflected light of the first polarization beam splitter 13 obtain...

Embodiment 2

[0131] Figure 5 For the optical path diagram of a sensitive unit provided in Embodiment 2 of the present invention, the reflective mirror 14 in Embodiment 1 is replaced with a reflective film 14' coated on the surface of the first polarizing beam splitter 13.

Embodiment 3

[0133] Figure 6 In the light path diagram of a sensitive unit provided by Embodiment 3 of the present invention, the measured surface is the two surfaces of a cube VI, the first polarizing beam splitter 13 is pasted on one of the measured surfaces, and the second reflector 15 is pasted on the other side. a measured surface. 13, 14, and 15 in this embodiment are the same parts as in Embodiment 1, just because the measured object in Embodiment 1 is L-shaped, and 15 is pasted on the L-shaped polyhedron on the back. The object to be measured in this embodiment is cube-shaped, so the size of 15 is larger than in Embodiment 1, and it is stuck on the cube from the front.

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Abstract

The invention provides a polyhedral workpiece included angle change laser measurement method and device based on common-path difference. The polyhedral workpiece included angle change laser measurement device comprises a laser emitting unit, a measuring unit, a sensitive unit and a zero calibration optical unit, wherein the measuring unit comprises a laser incident end, a collimating mirror, an isolator, a polarizer, a spectroscope, a focusing lens, a second polarizing spectroscope, a first detector and a second detector; the sensitive unit comprises a first polarizing beam splitter, a first reflector and a second reflector; the zero calibration optical unit is composed of a third polarizing beam splitter, a third reflector, a fourth reflector and a guide rail; and a beam of laser emittedby the laser passes through the collimating mirror and the polarizer to obtain two beams of orthogonally polarized light S light and P light, and the S light and the P light are transmitted by the spectroscope and then emitted along the same track. According to the polyhedral workpiece included angle change laser measurement method and the polyhedral workpiece included angle change laser measurement device, an S light signal and a P light signal are common-path signals between the measuring unit and the sensitive unit, so that the measurement error is reduced, and the measurement of the changeof the included angle of the precision workpiece in different states can be realized.

Description

technical field [0001] The invention relates to the technical field of spatial geometric precision detection, in particular to a laser measurement method and device for angle variation of polyhedral workpieces based on common path difference. Background technique [0002] With the development of precision manufacturing and processing technology, the requirements for the measurement accuracy of polyhedral workpiece angle changes are constantly increasing. The laser collimation measurement method is widely used in the measurement of the angle change of the polyhedron workpiece. However, due to the influence of many factors such as mechanical creep, air turbulence, and changes in the laser itself when the laser propagates in space, the laser light drifts, which brings errors to the measurement. In order to suppress the above-mentioned errors caused by light drift to the measurement, a common path method is usually used. The so-called co-path method is to divide the laser beam...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 冯其波于春宇郑发家袁丁赵宇琼朱兴鸿
Owner BEIJING JIAOTONG UNIV