A Photodetector Based on Curved Structured Metasurface
A photodetector and surface structure technology, applied in the field of optical metamaterials, can solve the problems of harsh selection of material and structure parameters, difficult design, and complicated parameters to consider, and achieves low requirements for parameters such as structure side length and thickness, and a simple structure. Effect
Active Publication Date: 2021-03-19
武汉敏芯半导体股份有限公司
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Problems solved by technology
At present, the design and research of metal metasurface absorbers are still based on the planar micro-nano structure, and the design is relatively difficult, considering complex parameters, and the selection of material and structural parameters is relatively harsh.
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[0014] The embodiment of the present invention provides a photodetector based on a metasurface with a curved structure, which is formed by periodically expanding a series of identical periodic units. Among them, see figure 1 , each period unit includes a substrate layer 3, a dielectric layer 2 disposed on the substrate layer 3, and a structural layer 1 disposed on the dielectric layer 2, wherein, see figure 2 , the structure layer 1 is a structure with a hemispherical groove 4 formed by digging out a hemisphere on the cube, and the thickness of the structure layer 1 is the same as the radius of the hemisphere, and the length and width of the structure layer 1 are equal to the diameter of the hemisphere .
[0015] As a specific embodiment of the present invention, the thickness H of the structural layer 1 1 If it is set to 200nm, and the radius of the hemisphere is also 200nm, the length L and width L of the structural layer 1 are both 400nm. The thickness H of the dielectr...
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Abstract
The invention provides a photodetector based on a curved surface structure metasurface, which is formed by periodically expanding a series of identical periodic units, each of which includes a substrate layer, a dielectric layer disposed on the substrate layer, and a dielectric layer disposed on the substrate layer. The structural layer on the medium layer, the structural layer is a structure with a hemispherical groove formed by digging out a hemisphere on the cube, the thickness of the structural layer is the same as the radius of the hemisphere, the structural layer The length and width are equal to the diameter of the hemisphere. The invention provides a photodetector based on a curved surface structure metasurface, which has a simple structure, low requirements on structural parameters, and high light absorption rate and responsivity.
Description
technical field [0001] The invention relates to the technical field of optical metamaterials, in particular to a photodetector based on a curved surface structure metasurface. Background technique [0002] The design and research of high-performance photodetector devices has always been the pursuit of the goal. The design and research of metal metasurface absorbers are of great significance for the development of micro-nano photodetector devices. Using the interaction between metal micro-nano structures and electromagnetic waves at the nanoscale Resonant coupling produces localized and propagating surface plasmons, both of which can fully confine electromagnetic waves inside the structure, thereby achieving perfect absorption of electromagnetic waves. At present, the design and research of metal metasurface absorbers are still based on the planar micro-nano structure, and the design is relatively difficult, considering complex parameters, and the selection of material and st...
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IPC IPC(8): G01J1/42G01J1/02G01J3/45
CPCG01J1/02G01J1/42G01J3/45
Inventor 周志强刘倚红阳红涛王任凡
Owner 武汉敏芯半导体股份有限公司