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Quartz tube/rod high-purity method and device, quartz tube/rod and application

A high-purity and purification technology, applied in the high-purity method of quartz tube/rod, quartz tube/rod, device field, can solve the problems of inability to meet the requirements of alkali metal content, high energy consumption, generation of electrodes, etc.

Active Publication Date: 2021-02-09
JIANGSU PACIFIC QUARTZ
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004]Because the alkali metal ions will move from the high temperature area to the low temperature area, the existing tube expansion process will lead to the increase of the alkali metal ion content in the inner wall of the large quartz tube, which cannot Meet the requirements of the conductor industry for the content of alkali metals in carrier materials
[0005]In the prior art, high-purification is also achieved by setting DC electrodes on the inner and outer walls of the quartz glass tube, but this method is not only complicated in structure, but also low in efficiency. The energy consumption is higher, and at the same time, the electrodes are in direct contact with the glass tube, which will cause electrodes to be generated in the glass tube during the purification process, and it is easy to cause defects on the surface of the glass tube

Method used

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  • Quartz tube/rod high-purity method and device, quartz tube/rod and application
  • Quartz tube/rod high-purity method and device, quartz tube/rod and application
  • Quartz tube/rod high-purity method and device, quartz tube/rod and application

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] First, a high purification step is carried out, and the quartz glass tube is heated. The heating source is a hydrogen-oxygen flame torch, and the heating temperature is 1900 ° C. The quartz glass tube rotates with its mandrel as a rotation axis, and the rotation speed is 45r / min; Two electrodes generate a continuous and stable arc outside the quartz glass tube, and an AC arc is generated by applying an AC voltage to the electrodes. The AC voltage is 180 kV, and the current is 120 mA. The electrodes and the blowtorch are on the outside of the quartz glass tube. The parallel direction is moved horizontally, and the horizontal movement speed is 60 mm / min, so that the alkali metal ions contained in the quartz glass tube are moved to the outer wall of the quartz glass tube.

[0061] After the high-purification step, tube expansion was performed, and the tube expansion temperature was 1860° C., the rotational speed was 130 r / min, and the horizontal movement speed of the torch ...

Embodiment 2

[0065] First, the pipe expansion step was carried out, the pipe expansion temperature was 1800° C., the rotational speed was 85 r / min, and the horizontal movement speed of the torch was 50 mm / min.

[0066] After tube expansion, a high purification step is carried out, and the quartz glass tube is heated. The heating source is a hydrogen-oxygen flame torch, and the heating temperature is 1880 ° C. The quartz glass tube rotates with its mandrel as a rotating shaft, and the rotational speed is 45r / min. ; A continuous and stable arc is generated outside the quartz glass tube through two electrodes, and an AC arc is generated by applying an AC voltage to the electrodes. The AC voltage is 150 kV and the current is 100 mA. The electrodes and the torch are on the outside of the quartz glass tube and the quartz glass tube. The axis is moved horizontally in the direction parallel to the axis, and the horizontal movement speed is 80 mm / min, so that the alkali metal ions contained in the q...

Embodiment 3

[0069] First, a high purification step is carried out, and the quartz glass tube is heated. The heating source is a hydrogen-oxygen flame torch, and the heating temperature is 1880 ° C. The quartz glass tube rotates with its mandrel as the rotation axis, and the speed is 55r / min; The two electrodes generate a continuous and stable arc outside the quartz glass tube, and an AC arc is generated by applying an AC voltage to the electrodes. The AC voltage is 180 kV and the current is 160 mA. The electrodes and the blowtorch are on the outside of the quartz glass tube. The parallel direction was moved horizontally, and the horizontal movement speed was 85 mm / min, so that the alkali metal ions contained in the quartz glass tube were moved to the outer wall of the quartz glass tube / rod.

[0070] Then carry out pipe expansion, the pipe expansion temperature is 1790 ℃, the rotation speed is 145 r / min, and the horizontal movement speed of the torch is 60 mm / min.

[0071] After the tube e...

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Abstract

The invention provides a quartz tube / rod high-purity method and device, a quartz tube / rod and application, The method is characterized in that the method comprises a high-purity step which comprises the substeps of heating a quartz glass tube / rod, generating a continuous and stable electric arc outside the quartz glass tube / rod such that alkali metal ions contained in the quartz glass tube / rod aremoved toward the outer wall of the quartz glass tube / rod. According to the technical scheme, the purity of the quartz glass tube / rod is improved, the production efficiency is improved, meanwhile, therequirement for equipment is simple, and the engineering cost is greatly saved.

Description

technical field [0001] Embodiments of the present disclosure relate generally to the field of quartz glass production, and more particularly, to methods, apparatus, quartz tubes / rods, and uses for high purification of quartz tubes / rods. Background technique [0002] High-purity quartz material has become an indispensable carrier material in this field due to its special physical properties such as temperature resistance, acid resistance, low expansion, and light transmittance. Fused silica tubes are widely used in batch furnaces as high purity reaction chambers, gas / liquid inlets or transfer conduits. Diffusion tubes, bell jars, etc. made of quartz materials run through key processes such as diffusion, oxidation, deposition, and etching in the semiconductor process. The semiconductor industry places stringent demands on the alkali metal content of carrier materials. [0003] In the semiconductor industry, it is necessary to produce large-scale quartz tubes by a tube expans...

Claims

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Application Information

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IPC IPC(8): C03C23/00C03B23/053C03B23/043C03B23/045
CPCC03C23/007C03B23/053C03B23/043C03B23/045C03B2201/02C03B2201/03
Inventor 陈士斌厉广强王东超刘守科徐新奎钱卫刚
Owner JIANGSU PACIFIC QUARTZ