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Preparation method of pd/ti double-layer getter film and pd/ti double-layer getter film

A getter thin film and thin film technology, which is applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of affecting pumping speed, poor preparation effect, and destroying ultra-high vacuum

Active Publication Date: 2022-01-04
INST OF HIGH ENERGY PHYSICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The inventors found that in the related art, when preparing the Pd / Ti double-layer getter film, the ultra-high vacuum will be destroyed, the pumping speed will be affected, and the preparation effect will be poor.

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  • Preparation method of pd/ti double-layer getter film and pd/ti double-layer getter film
  • Preparation method of pd/ti double-layer getter film and pd/ti double-layer getter film
  • Preparation method of pd/ti double-layer getter film and pd/ti double-layer getter film

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Embodiment Construction

[0023] Embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary, and are only for explaining the present application, and should not be construed as limiting the present application. On the contrary, the embodiments of the present application include all changes, modifications and equivalents falling within the spirit and scope of the appended claims.

[0024] figure 1 It is a schematic flow chart of a method for preparing a Pd / Ti double-layer getter film proposed in an embodiment of the present application.

[0025] The preparation method of the Pd / Ti double-layer getter thin film in the embodiment of the present application is applied in the preparation equipment, see figure 2 , figure 2 It is a sch...

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Abstract

The application proposes a method for preparing a Pd / Ti double-layer getter film and a Pd / Ti double-layer getter film. The method includes performing evaporation coating when obtaining the lowest background pressure, and adopting a first deposition current of 45A. At the first deposition temperature between 200 degrees Celsius and 300 degrees Celsius, the Ti metal wire is sublimated within the first deposition time of 60 minutes to 90 minutes, thereby depositing Ti element on the surface to be plated to form a bottom film; While depositing the Ti element on the surface, use the second deposition current of 45A, the second deposition temperature between 100 degrees Celsius and 180 degrees Celsius, and the second deposition time of 20 minutes to sublimate the Pd metal wire, thereby depositing the Pd element on the underlying film. The surface of the base film forms the skin film. It can avoid destroying ultra-high vacuum when preparing Pd / Ti double-layer getter film, thus taking into account the maintenance of ultra-high vacuum and the low activation temperature of Pd / Ti double-layer getter film, and assisting in increasing the pumping speed of the preparation equipment , to improve the preparation effect of Pd / Ti double-layer getter films.

Description

technical field [0001] The present application relates to the technical field of vacuum packaging, in particular to the technical field of vacuum packaging of ultra-high vacuum, particle accelerators, and MEMS (Micro-Electro-Mechanical System, micro-electro-mechanical systems) electronic devices, and in particular to a Pd / Ti double-layer getter Film preparation method and Pd / Ti bilayer getter film. Background technique [0002] Non-evaporable getter (NEG)) thin films are widely used in many accelerators and light source devices around the world due to their unique advantages such as small size, easy preparation, oil-free, non-magnetic, and vibration-free. [0003] The inventors have found that in the related art, the ultra-high vacuum will be destroyed when preparing the Pd / Ti double-layer getter film, which will affect the pumping speed and the preparation effect is not good. Contents of the invention [0004] This application aims to solve one of the technical problems ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/16C23C14/56
CPCC23C14/24C23C14/16C23C14/564
Inventor 张志伟何平马永胜
Owner INST OF HIGH ENERGY PHYSICS CHINESE ACAD OF SCI
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