Online graphite boat deformation detection system and deformation detection method

Abstract

The invention discloses an online graphite boat deformation detection system and a deformation detection method. The detection system comprises a graphite boat conveying module, a laser measurement module, an analysis processing module and a control module, wherein the control module and the analysis processing module are both arranged on the industrial personal computer, and the control module isin communication connection with the laser measurement module; the graphite boat conveying module is mounted between the PECVD machine table and the automatic wafer loading and unloading machine table and is used for conveying graphite boats; the laser measurement module is installed at any position between the PECVD machine table and the automatic wafer loading and unloading machine table, measures a moving graphite boat in real time, and uploads measurement data to the analysis processing module; the analysis processing module calculates and analyzes the measurement data and obtains a detection result of whether the graphite boat is deformed or not. Full-automatic production is adopted, the laser measurement module and the analysis processing module are additionally arranged, deformation detection is carried out on the graphite boat in operation, the work of manual detection of the graphite boat by regular shutdown is omitted, and the productivity is improved.

Description

Technical field[0001]The invention relates to the technical field of graphite boat deformation detection, in particular to an online graphite boat deformation detection system and a deformation detection method.Background technique[0002]As the cost of photovoltaic power generation continues to decrease, solar power generation will have a broader market space. As a carrier for the anti-reflection coating of solar cells, the structure and size of graphite boat directly affect the conversion efficiency and production efficiency of silicon wafers. The graphite boat automatic loading and unloading machine puts the uncoated silicon wafers on the card points of the graphite boat page through the robot suction cup, and a fixed number of silicon wafers can be placed on each boat. After placing all the silicon wafers, the graphite boat is driven into the PECVD coating machine through the belt line. The silicon wafers on the graphite boat undergo a specific chemical reaction under high tempera...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the deficiencies in the prior art, and provide an online graphite boat deformation detection system and deformation detection method to solve the problem that the deformation of the graphite boat cannot be predicted in the prior art, and it is necessary to manually check whether the graphite boat is deformed regularly. And the problem that causes the process to stagnate and affects the production capacity

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