A Zoom Compensator Optical System for Aspheric Surface Detection

Abstract

The invention discloses a zoom compensator optical system for aspheric surface detection, which includes an interferometer, a zoom compensator, and a measured aspheric surface. The device includes a first compensation lens and a second compensation lens, and there is a focusing mechanism between the two lenses. After the light emitted by the interferometer is transmitted through the first compensation lens and the second compensation lens, it is self-collimated and reflected by the measured aspheric surface. Then it is transmitted back to the interferometer through the second compensation lens and the first compensation lens to form a detection light path. The present invention can compensate the aberration of complex surface shapes that vary in a wide range, complete high-precision detection of various aspheric surface shapes without remanufacturing compensators, and has the advantages of simple structure, strong surface shape adaptability, etc. Features: It increases the degree of freedom in design, and can produce aberrations that vary in a wide range according to the incident angle and position of the beam; it improves the versatility of measurement.

Description

technical field [0001] The invention belongs to the technical field of optical detection, and in particular relates to a zoom compensator optical system used for surface shape detection of aspheric optical mirrors. Background technique [0002] Compared with traditional spherical elements, aspheric optical mirrors have better design freedom and flexible spatial layout. By optimizing the design parameters of aspheric surfaces, the purpose of correcting system aberrations and improving imaging quality can be achieved. The good use characteristics and imaging capabilities of the aspheric surface are guaranteed by its accurate geometric profile and high-precision surface shape. In current high-tech applications, the surface accuracy requirements of aspheric surfaces have reached the nanometer level, or even sub-nanometer level. The corresponding processing methods include advanced optical processing methods such as smooth processing, magnetorheological and ion beam processing. ...

AI Technical Summary

Problems solved by technology

The Chinese patent document with the notification number CN 106052583A discloses "aspheric surface shape interferometric method and device based on variable compensation lens", in which the variable compensation mirror is a single high-order aspheric lens with a compensation capability range of only 0.04λ ~17.8λ, while the high-precision processing and detection of high-order aspheric surfaces are difficult, and the aspheric surface parameters have large errors after processing; Professor Li Huilan of Beijing Institute of Technology proposed a three-piece partial compensator, by changing the relative axes of the three components To change the compensation characteristics of the compensator to the distance, the range of compensation ability for the concave aspheric surface is only 92.8λ~121.7λ, and the residual spherical aberration after compensation is too large, which cannot guide the final inspection of the high-precision aspheric surface shape

The compensation method of the above-mentioned compensator has too much residual spherical aberration and cannot meet the requirements of high-precision aspheric surface shape detection

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