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Fractional Fourier holographic femtosecond laser three-dimensional parallel processing and monitoring system and method

A fractional Fourier and fractional Fourier technology, which is applied in the field of fractional Fourier holographic femtosecond laser three-dimensional parallel processing and monitoring systems, can solve the problems of shortening processing time and low efficiency, and improve the utilization rate of laser energy. , The application is flexible and variable, and the effect of reducing processing errors

Pending Publication Date: 2021-02-23
QINGDAO TECHNOLOGICAL UNIVERSITY
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Problems solved by technology

[0006] In order to solve the shortcomings of the existing technology, the present disclosure provides a three-dimensional parallel processing and monitoring system and method of fractional Fourier holographic femtosecond laser, which overcomes the problems of multi-dimensional scale processing and low efficiency, and solves the problem of complex shape microstructure processing. Difficulty, effectively improving the processing quality and processing efficiency of the three-dimensional distribution microstructure, increasing the processing efficiency to more than an order of magnitude, significantly shortening the processing time, and greatly improving the position accuracy of the three-dimensional distribution between structures

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  • Fractional Fourier holographic femtosecond laser three-dimensional parallel processing and monitoring system and method
  • Fractional Fourier holographic femtosecond laser three-dimensional parallel processing and monitoring system and method
  • Fractional Fourier holographic femtosecond laser three-dimensional parallel processing and monitoring system and method

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Embodiment 1

[0059]As introduced in the background art, the existing laser processing technology has processing dimensions and efficiency limitations, which have become an obstacle to the development and industrial application of laser micro-nano manufacturing technology. In order to solve the above technical problems and break through the limitations of laser multi-dimensional processing and efficiency, Embodiment 1 of the present disclosure proposes a fractional Fourier holographic femtosecond laser three-dimensional parallel processing system, such asfigure 1 withfigure 2 Shown.

[0060]The system described in this embodiment can use a programmable liquid crystal spatial light modulator (LOC-SLM) to modulate the femtosecond laser beam without changing the focal length of the lens to control the focus position of the beam to obtain a three-dimensional, arbitrarily distributed focused spot array. It is a precise and efficient multi-dimensional laser processing method that can realize the three-dim...

Embodiment 2

[0072]Embodiment 2 of the present disclosure provides a fractional Fourier holographic femtosecond laser three-dimensional parallel processing monitoring system, such asimage 3 ,Figure 4 withFigure 5 As shown, it includes the parallel processing system described in Embodiment 1 of the present disclosure and the LED white light source 11, the first collimator 12, the second beam splitter 13, the infrared filter 10, the second lens 14, and the first CCD camera 15. ;

[0073]The light beam emitted by the LED white light source 11 sequentially passes through the first collimator 12, the second beam splitter 13, the infrared filter 10 and the first focusing objective lens 8 to reach the surface of the workpiece;

[0074]The reflected light reaches the first CCD camera 15 after passing through the first focusing objective lens 8, the infrared filter 10, the second beam splitter 13, and the second lens 14, and real-time monitoring of workpiece processing is carried out according to the image rec...

Embodiment 3

[0082]The present disclosure Example 3 provides a three-dimensional parallel processing method of fractal Fourier holographic femtosecond laser, using the monitoring system described in Example 2, including the following steps:

[0083]S1: Optical Interferometry Measuring the surface profile of the workpiece, transmitting the camera to the camera to obtain a surface three-dimensional shape by image processing;

[0084]S2: Combined with the three-dimensional shape of the workpiece surface and the distribution, size, shape, etc. of the target microstructure, and the control center converts the surface profile of the workpiece to the point array information;

[0085]S3: According to different depth information, design target patterns and corresponding coordinate files; the same position in the three-dimensional distribution focus array corresponds to the same range, and calculates three-dimensional division of Fourier hologram through iterative fractional Fourier transform algorithm. ;

[0086]S4:...

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Abstract

The invention provides a fractional Fourier holographic femtosecond laser three-dimensional parallel processing and monitoring system and a fractional Fourier holographic femtosecond laser three-dimensional parallel processing and monitoring method. The system comprises a spatial light modulator, a Fourier lens, a first lens, a first spectroscope and a first focusing objective lens; the spatial light modulator is configured to receive a femtosecond laser beam and a fractional Fourier hologram and emit a plurality of paths of modulated light beams to a plurality of focusing planes; and after the light beams passing through the focusing plane sequentially pass through the first lens, the first spectroscope and the first focusing objective lens, a light spot array is focused at a plurality ofdifferent depths of a specific machining position. The system and method provided by the invention solve the problems about multi-dimensional scale machining and low efficiency, overcome the machining difficulty of a microstructure in a complex shape, effectively improve the machining quality and the machining efficiency of a microstructure in a three-dimensional distribution, improve the machining efficiency to one order of magnitude or above, remarkably shorten the machining time, and greatly improve the inter-structure position precision of three-dimensional distribution.

Description

Technical field[0001]The present disclosure relates to the fields of ultrafast laser precision processing technology and optical holographic processing technology, in particular to a fractional Fourier holographic femtosecond laser three-dimensional parallel processing and monitoring system and method.Background technique[0002]The statements in this section merely provide background technology related to the present disclosure, and do not necessarily constitute prior art.[0003]With the rapid development and application of material science, modern cutting-edge manufacturing technology is no longer limited to the miniaturization of precision and scale. It has become an important task to seek new breakthroughs in processing dimensions and efficiency. As a non-contact processing technology, laser processing has flexible processing methods and a wide range of applications. In terms of processing methods, not only can the target structure be processed by removing the material matrix, such...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/0622B23K26/046B23K26/064B23K26/70
CPCB23K26/0622B23K26/046B23K26/0648B23K26/0643B23K26/702
Inventor 孙树峰王津王萍萍张丰云王茜邵晶
Owner QINGDAO TECHNOLOGICAL UNIVERSITY
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