Ultra-wideband beam splitting and combining device
A beam combiner and ultra-broadband technology, applied in the direction of instruments, optical waveguide coupling, light guide, etc., can solve the problems of low transmission efficiency, difficulty in large-scale integration, and high manufacturing precision requirements
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[0073] The embodiment of the present invention also provides a preparation method of an ultra-broadband beam splitter and combiner. For details, see Figure 5 . As shown in the figure, it includes the following steps:
[0074] Step 501, providing a substrate;
[0075] Step 502, forming a first waveguide layer on the substrate;
[0076] Step 503, directly forming a second waveguide layer on the first waveguide layer, wherein the second waveguide layer includes an input tapered waveguide region and an output tapered waveguide region for optical signal coupling;
[0077] Wherein, the first projection of the input graded waveguide region in the direction perpendicular to the substrate, the second projection of the output graded waveguide region in the direction perpendicular to the substrate, and the first waveguide layer A third projection in a direction perpendicular to the substrate satisfies the following relationship: the first projection and the second projection complete...
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