High-precision large-field-of-view wavefront measurement method, electronic equipment and medium

Abstract

The invention discloses a high-precision large-field-of-view wavefront measurement method. The method comprises the following steps of: obtaining a pair of lattice diagrams in the presence / absence ofan optical distortion field; arranging an M*N query window array in an inquiry area of the pair of lattice diagrams; carrying out cross-correlation calculation processing, and calculating the coordinates of a central point of the inquiry area and the centroid coordinates of an inquiry window before and after deflection; calculating light deflection angles in x and y directions of the centroid of the corresponding inquiry window according to the coordinates of the central point of the inquiry area, the centroid coordinates of the inquiry window before and after deflection and the distance L between a mask plate and an imaging target surface; obtaining wavefront propagation direction information according to the Huygens principle; and carrying out wavefront reconstruction by utilizing the obtained wavefront propagation direction information through an integration method, obtaining an optical path OPL result, and completing wavefront measurement work. According to the invention, the imaging characteristics of a common convergent lens are utilized, under the condition of low cost, large-field-of-view wavefront accurate measurement is realized, an extra large-size concave mirror or lensis not needed, and the cost is low.

Description

technical field [0001] The invention relates to the technical field of wavefront measurement, in particular to a high-precision large-field wavefront measurement method, electronic equipment and a medium. Background technique [0002] The earliest Hartmann wavefront sensor is mainly realized by arranging a Hartmann plate with many small holes in front of the imaging target surface. The light beam will form many small beams after passing through the Hartmann plate. The position of the beam on the target surface will change after being affected by the disturbance of the variable refractive index field. According to the Huygens principle combined with the distance between the Hartmann plate and the target surface, the spatial gradient of the wavefront at the corresponding small hole can be obtained, and an appropriate integral method is selected to complete the wavefront reconstruction. The Shack-Hartmann (S-H) wavefront sensor replaces the early Hartmann plate by using a mic...

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Problems solved by technology

[0004] On the one hand, the present invention provides a high-precision large-field wavefront measurement method to solve the problem that the existing large-scale wavefront measurement requires large-scale optical lenses or concave mirrors, which leads to a significant increase in testing costs and makes it difficult to achieve a larger field of view. Technical Problems of Field High Precision Wavefront Measurement

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