Preparation method of geological slice sample for TEM analysis

Abstract

The invention discloses a preparation method of a geological slice sample for TEM analysis. The preparation method comprises the following steps: preparing a slice; selecting an analysis area; fixingthe slice; drilling the analysis area; and obtaining an ion-thinned slice sample, and carrying out ion thinning treatment. A conventional geological slice used for TEM analysis is segmented by a glasscutter, reuse of other areas of the geological slice is affected, the hardness difference between mineral rocks is large, the TEM sample preparation success rate is low, a selected sample area is prepared in a drilling mode for the first time, the TEM sample preparation efficiency is greatly improved, and the success rate of preparation of the TEM sample of the geological slice is improved.

Description

technical field [0001] The invention relates to a preparation method of a transmission electron microscope (Transmission electron microscope, hereinafter referred to as TEM) sample, in particular to a preparation method of a geological thin section sample for TEM analysis. Background technique [0002] In the prior art, TEM sample preparation methods mainly include electrolytic polishing, ultrathin sectioning, ion thinning and focused ion beam, etc. Electropolishing is mainly for conductive samples, and most geological samples are non-conductive; ultra-thin slices are suitable for cutting samples with small hardness, or samples with little difference between soft and hard particles, and are mainly used in the fields of biology and chemistry, while geological samples are often It is an aggregate of rock mineral particles with large differences in hardness and softness; while Focused Ion Beam (FIB) can sample specific positions for different types of samples, but the observed ...

AI Technical Summary

Problems solved by technology

The original method used to be to directly use a glass knife to cut the slide multiple times to obtain the area to be analyzed, and then separate the slide and the sample by grinding and polishing. This method not only directly destroys the thin section, but also causes damage to other areas of the thin section. It can no longer be used for analysis, and because the hardness of the minerals on the thin slice is not uniform, there may be cracks in individual minerals, so when cutting the glass slide, the mineral sample to be observed will collapse directly due to force, resulting in the failure of sample preparation, and also One is to use FIB for fixed-point cutting, but this method is not only expensive, but also for some minerals that are not resistant to electron beam bombardment, it will make the crystal amorphous and cause artificial artifacts in sample preparation

Images