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Micro-cavity with chiral polarization selectivity as well as preparation method and application thereof

A selective and polarized technology, applied in optical components, optics, instruments, etc., can solve the problems of increasing the complexity of the optical path, difficult to achieve the simplicity of device integration and testing, reducing the dependence on external conditions, simplifying the optical path, The effect of improving simplicity

Inactive Publication Date: 2021-03-26
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This will increase the complexity of the optical path, and it is difficult to achieve the simplicity of device integration and testing

Method used

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  • Micro-cavity with chiral polarization selectivity as well as preparation method and application thereof
  • Micro-cavity with chiral polarization selectivity as well as preparation method and application thereof
  • Micro-cavity with chiral polarization selectivity as well as preparation method and application thereof

Examples

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Effect test

Embodiment 1

[0025] A microcavity with chiral polarization selectivity, such as figure 1 As shown, a substrate 1 , a metal mirror 2 , a dielectric layer 3 and a chiral metamaterial 4 are sequentially included from bottom to top. The preparation of the microcavity with chiral polarization selectivity comprises the following steps:

[0026] In the first step, a metal mirror 2 with high reflectivity is plated on the substrate 1 by electron beam evaporation technology; wherein, the material used for the substrate 1 is silicon, and the material used for the metal mirror 2 is silver, with a thickness of 800nm.

[0027] In the second step, a dielectric layer 3 is plated on the metal mirror 2 by electron beam evaporation technology; wherein, the material used for the dielectric layer 3 is silicon oxide with a thickness of 233nm.

[0028] In the third step, using electron beam lithography and electron beam evaporation technology, the chiral metamaterial 4 is plated on the dielectric layer 3; where...

Embodiment 2

[0031] A microcavity with chiral polarization selectivity, such as figure 1 As shown, a substrate 1 , a metal mirror 2 , a dielectric layer 3 and a chiral metamaterial 4 are sequentially included from bottom to top. The preparation of the microcavity with chiral polarization selectivity comprises the following steps:

[0032] In the first step, a metal mirror 2 with high reflectivity is plated on the substrate 1 by electron beam evaporation technology; wherein, the material used for the substrate 1 is quartz, and the material used for the metal mirror 2 is aluminum, with a thickness of 1000nm.

[0033] In the second step, a dielectric layer 3 is plated on the metal mirror 2 by using electron beam evaporation technology; wherein, the material used for the dielectric layer 3 is titanium oxide with a thickness of 149nm.

[0034] In the third step, using electron beam lithography and electron beam evaporation technology, the chiral metamaterial 4 is plated on the dielectric layer...

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Abstract

The invention belongs to the technical field of micro-nano photons, and discloses a micro-cavity with chiral polarization selectivity as well as a preparation method and application thereof. The micro-cavity with chiral polarization selectivity sequentially comprises a substrate, a metal reflecting mirror, a dielectric layer and a chiral metamaterial from bottom to top, wherein the chiral metamaterial is of a periodic array micro-nano structure, the shape of a single array period is F-shaped, or the shape obtained after F rotates or turns over at any angle. According to the invention, the chiral polarization selectivity of the micro-cavity can be realized without adding a polarizing film at the incident light, so that a light path is simplified, the dependence on external conditions is reduced, the test simplicity is improved, and the integration level of the device is improved.

Description

technical field [0001] The invention belongs to the field of micro-nano photon technology, in particular to a microcavity with chiral polarization selectivity, a preparation method and application thereof. Background technique [0002] In the microcavity, the excitons radiated by the semiconductor couple with the microcavity modes to generate exciton polaritons. Due to the valley polarization characteristics of semiconductor materials, excitons with different valley polarizations will be excited by incident light with different chiral polarizations (left-handed polarization and right-handed polarization), and excitons with different chiral polarizations will be generated in the microcavity. Yuan. However, the current microcavity structure is basically a Fabry-Perot microcavity composed of distributed Bragg mirrors and metal mirrors, which does not have chiral polarization selectivity. In order to obtain exciton polaritons with different chiral polarization, people usually ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/00G02B1/00
CPCG02B27/00G02B1/002
Inventor 杨亿斌招瑜肖也黄乐陶丽丽
Owner GUANGDONG UNIV OF TECH
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