Control method for improving environmental robustness of low-cost MEMS array sensor
A technology of environmental robustness and control method, which is applied in the control field of improving the environmental robustness of low-cost MEMS array sensors, can solve the problems of reduced sensor accuracy, deterioration of environmental robustness, and difficulty in meeting engineering application requirements, etc. Achieve the effect of suppressing influence and improving robustness
Inactive Publication Date: 2021-04-02
NORTHWESTERN POLYTECHNICAL UNIV
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However, further analysis shows that the above method does not consider environmental factors in the modeling process. When environmental factors such as temperature changes and vibration shocks affect the array sensor, the accuracy of the sensor will inevitably decrease, and its environmental robustness will also decrease. Deterioration, it is difficult to meet the engineering application requirements in complex environments
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[0013] In this embodiment, a control method for improving the environmental robustness of a low-cost MEMS array sensor is used to suppress environmental disturbances to the MEMS gyroscope array. The sensor array in this embodiment is composed of 3 gyroscopes, and the array is in the In the interference environment of the UAV strong wind field, the steps of its control method are as follows:
[0014] Step 1: Establish a continuous-time state-space model of the unknown disturbance input for the measurement of the MEMS gyroscope:
[0015]
[0016]
[0017] in and represent the state vector and measurement vector of the i-th (i=1, 2, . . . , N) MEMS gyroscope, respectively. and Represent process noise and measurement noise respectively, both of which are zero-mean Gaussian white noise, and their variances satisfy and where R=0.04(rad / s) 2 , Q=0.01(rad / s) 2 . represents the state transition matrix, represents the scale factor, represents the noise matrix, ...
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The invention relates to a control method for improving the environmental robustness of a low-cost MEMS array sensor, and belongs to the field of micro electro mechanical systems. The method comprisesthe following steps of: firstly, performing local state estimation through an E step in an EM algorithm by utilizing local measurement data of each MEMS sensor node in a multi-sensor array; secondly,adaptively adjusting a weight coefficient according to the state estimation difference between the current sensor node and the adjacent node, designing a consensus filtering algorithm, performing weighted fusion on the state estimation of the current node and the adjacent node, and updating the local state estimation of the current sensor node by using a fusion value; and finally, performing expectation maximization calculation by using the updated local state estimation in an M step in the EM algorithm to obtain estimation of an unknown disturbance information value, and subtracting the unknown disturbance estimation from measurement data to complete suppression of unknown disturbance. Therefore, the robustness of the MEMS sensor array in a complex environment is effectively improved.
Description
technical field [0001] The invention relates to a control method for improving the environmental robustness of a low-cost MEMS array sensor, belonging to the field of micro-electromechanical systems. Background technique [0002] MEMS sensors have broad application prospects in the fields of industrial electronics, the Internet of Things, and artificial intelligence because of their light weight, small size, batch manufacturing, and low cost. For example, MEMS gyroscopes are widely used in attitude angle measurement of mobile phones, tablet computers, drones and missiles due to their small size and low cost. However, the low-precision characteristics of MEMS sensors significantly restrict their application range. [0003] Sensor array technology is an effective method to improve the accuracy of MEMS sensors. The search found that document 1 "Minimum Variance Optimal Filter Design for a 3×3 MEMS Gyroscope Cluster Configuration" constructed a MEMS gyroscope array, establishe...
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IPC IPC(8): G05B13/04
CPCG05B13/042
Inventor 申强李佳宇常洪龙杨登锋苑伟政
Owner NORTHWESTERN POLYTECHNICAL UNIV