Broadband electrical detection method and system based on electrostatic force microscope, and readable medium

Abstract

The invention relates to a broadband electrical detection method and system based on an electrostatic force microscope, and a readable medium. The method comprises the following steps: S1, obtaining the morphology of a to-be-detected sample through the electrostatic force microscope, and determining a to-be-detected area according to the morphology; S2, moving a probe of the electrostatic force microscope to the to-be-detected area, and applying a difference frequency voltage of the first voltage and the second voltage to the probe; S3, obtaining the electrostatic force change between the probe and the to-be-measured area under the difference frequency voltage, and calculating the spatial distribution information of the capacitance of the to-be-measured area according to the electrostatic force change in combination with the first voltage and the second voltage; and S4, calculating the electrical performance of the to-be-tested area according to the spatial distribution information of the capacitance of the to-be-tested area. By measuring and analyzing the difference frequency signal in the electrostatic force between the tip of the EFM and the sample, the local electrical information of the sample in the broadband electrostatic field can be quickly and accurately obtained.

Description

technical field [0001] The invention relates to a broadband electrical detection method, system and readable medium based on an electrostatic force microscope, belonging to the technical field of the electrostatic force microscope. Background technique [0002] Electrostatic Force Microscopy (EFM), based on Atomic Force Microscopy (AFM), uses conductive probes for measurement, applies voltage modulation between the probe and the sample, and measures the influence of electrostatic force on the amplitude or phase of the probe , to measure various electrical related properties. [0003] The existing electrostatic force microscopes mainly include voltage modulated EFM (VM-EFM), Kelvin microscope (scanning Kelvin probe microscope, SKPM), high harmonic EFM (multi harmonic EFM, MH-EFM). )Wait. figure 1 It is a schematic diagram of the principle of high-order resonance electrostatic force. This technology adopts a dual pass mode (also called Lift Mode). In the first scan, its wor...

AI Technical Summary

Problems solved by technology

[0004] Although the electrostatic force microscope has been widely used to detect the electrical properties of samples, because the electrical properties of samples depend on the frequency of the excitation voltage during detection

Usually, when the sample is excited by a low-frequency electric field, the charge and discharge of the capacitor dielectric layer between the tip of the EFM and the sample can keep up with the frequency change of the excitation voltage, but when the sample is excited by a high-frequency electric field, the gap between the tip of the EFM and the sample The charge and discharge of the capacitor dielectric layer cannot keep up with the frequency change of the excitation voltage. Therefore, it is difficult to use the existing EFM to detect the electrical properties of the sample under the electric field with a frequency of hundreds of kHz to tens of GHz.

Images