Efficient anti-vibration ion source filament assembly and manufacturing method thereof

Abstract

The invention discloses an efficient anti-vibration ion source filament assembly. Two ends of a filament are connected with first ends of two electrodes, a fixed base is a ceramic base, two welding through holes are formed in the fixed base, and metallized layers subjected to metallization treatment are arranged on hole walls at two ends of each welding through hole; and the second ends of the two electrodes penetrate through the two welding through holes respectively and are connected with the corresponding metallization layers in a welded mode. The invention further discloses a manufacturing method of the efficient anti-vibration ion source lamp filament assembly. The fixed base is subjected to metallization treatment, and then electrode welding and lamp filament welding are conducted. According to the invention, the ceramic fixed base with hard texture is adopted, and the metallization layers are arranged at the position, connected with the electrodes, of the fixed base, so that sufficient vibration resistance between the electrodes and the fixed base is ensured, the structure is stable in the vibration and impact process, it is ensured that the ion source filament assembly can work normally under the high vibration magnitude and cannot be damaged by vibration.

Description

technical field [0001] The invention relates to an ion source filament assembly, in particular to a high-efficiency anti-vibration ion source filament assembly and a manufacturing method thereof. Background technique [0002] Ion source (English name: Ion source) is a device that ionizes neutral molecules and draws an ion beam from it. It is a variety of ion accelerators, mass spectrometers, electromagnetic isotope separators, ion implanters, ion beam etching devices, Indispensable components in equipment such as ion thrusters and neutral beam injectors in controlled fusion devices. Ion sources are the core components of precision instruments and have high requirements for the use environment. However, some ion sources have special applications, such as electron bombardment ion sources, which need to maintain normal and stable operation without damage at relatively high vibration levels. How to improve the anti-vibration performance of ion sources has become the primary tec...

AI Technical Summary

Problems solved by technology

Both of the above two structures have the problem of poor anti-vibration performance. The former is difficult to achieve a high-stability connection between the metal segment and the non-metal segment, and the latter is difficult to achieve a high-stability connection between the electrode and the fixed base.

[0005] In addition, the fixed base of the filament assembly of the traditional ion source, the materials used for the filament and the electrode itself do not have sufficient strength, and the filament and the electrode are directly welded, and the welding area is small, which also leads to insufficient anti-vibration performance.

Images