Friction asymmetric inertial piezoelectric linear drive device and method

Abstract

The invention relates to a friction asymmetric inertial piezoelectric linear drive device and method, belonging to the field of precision machinery. The drive device includes a base unit, a drive unit and a slider. The drive unit is an asymmetric flexible hinge mechanism with a bridge-type displacement amplifying hinge and two pairs of left and right drive feet with different rigidities, which are connected to the slider via screws; the slider slides on the guide rail of the basic unit; the drive unit passes interference fit Installed in the U-shaped groove of the base unit. The driving method of the device is: the rigidity of the left and right pairs of driving feet is different, resulting in the difference in the maximum static friction between them and the U-shaped groove. When the continuous zigzag driving voltage is applied to the piezoelectric stack, based on the principle of inertial impact, The slider will produce linear stepping motion. The advantages are: simple structure, easy processing, assembly and control, high-speed, large-stroke and high-load output can be realized, and there is no retraction displacement. It has good application prospects in the fields of micro-nano manipulation, precision instruments, and precision machining.

Description

Technical field [0001] The present invention relates to the field of precision machine, and more particularly to a frictionless non-symmetric inertial piezoelectric line driving device and method for precision / super precision machining, precision optical and instruments, micro operation, biomedical engineering and other fields. Background technique [0002] It is very important to apply and demand in the scientific community and the industry. The step-type piezoelectric precision drive is widely used in the fields of precision machining and assembly, micro-operating, precision machinery and instruments such as precision machining and assembly due to high precision machining, simple structure, simple structure, simple and flexible, and simple control. The step-type piezoelectric drive is based in accordance with the driving principle, mainly including feet, bond slip, ultrasound and inertial. Although the drive principle is different, the above piezoelectric driving devices are ...

AI Technical Summary

Problems solved by technology

Inchworm-type piezoelectric actuators are generally easy to achieve large output force and output displacement without retraction, but their structure and assembly are quite complicated, which limits their practical application

The structure and control of the stick-slip piezoelectric actuator are relatively simple, and the design is relatively flexible, but its output displacement has backlash and its output force is low

The ultrasonic piezoelectric drive device works in a resonance state, its design is relatively complex, and its positioning resolution and accuracy are low. At the same time, the friction and wear caused by the high-frequency contact between the rotor and the stator are serious.

The structure and control of inertial piezoelectric actuators are also relatively simple, but most of the current inertial piezoelectric actuators have problems with overturning moment and large-mass cantilever, resulting in unstable motion of the entire actuator

For example, in the literature (A low-frequency structure-control-typeinertial actuator using miniaturized bimorph piezoelectric vibrators, IEEETransactions on Industrial Electronics, 2019, 66, 6179-6188), an inertial piezoelectric actuator was designed using piezoelectric bimorph as the driving source. Although the device can achieve a large stroke, it contains a large-mass cantilever, which limits the operating frequency bandwidth of the drive device and easily causes system vibration

Literature (Inertial linearactuator driver by piezoelectric stack with changeable friction coefficients, Nanotechnology and Precision Engineering, 2008, 6(3), 190-194) adopts piezoelectric stack and mass block as power components, and designs a friction coefficient variable inertial Linear piezoelectric drive device, although the device can achieve precise drive, but the power element part of the device has a large mass block, which is prone to overturning moment during the movement process, causing system instability and affecting its output performance

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