Micro/nano-scale ion beam epitaxy leading-out device

Abstract

The invention discloses a micro / nano-scale ion beam epitaxy leading-out device which is connected with an ion source. The micro / nano-scale ion beam epitaxy leading-out device comprises a first chamber, an air resistor, a second chamber, a four-dimensional mobile platform and a capillary tube, wherein the first chamber is separately connected with the ion source and the air resistor; the air resistor is connected with the second chamber; an ion beam generated by the ion source is transmitted to the second chamber according to an air pressure difference between the first chamber and the second chamber; the second chamber is connected with the four-dimensional mobile platform; the four-dimensional mobile platform is connected with the capillary tube; and the four-dimensional mobile platform controls the capillary tube to move on a plane vertical to the ion beam direction and adjusts the inclination angle and the pitch angle of the capillary tube, so the ion beam in the second chamber enters the capillary tube, and the capillary tube leads the ion beam to the atmosphere, thereby obtaining a high-quality ion beam epitaxy with a micron-scale or even nano-scale beam spot size.

Description

technical field [0001] The invention relates to the field of ion beam external beams, in particular to a micro-nano scale ion beam external beam extraction device. Background technique [0002] Micro-nano-scale ion external beam is a widely used analytical tool. Due to the high spatial resolution and MeV energy range of ion probes, through ion beam analysis (IBA) technology, micro-external beam can be applied in many fields. For example, materials, earth science, cultural relics and archaeology, and environmental science, etc., and a wide range of biomedical experiments and applications can be carried out by extracting micron or nanometer-sized external beams into the atmosphere. [0003] The ion external beam obtained by the traditional exit window film has the following disadvantages: (1) The beam size is too large, which is not conducive to the application of fine structure analysis and biological cell experiments. (2) When the ion beam passes through the exit window fil...

AI Technical Summary

Problems solved by technology

[0003] The ion external beam obtained by the traditional exit window film has the following disadvantages: (1) The beam size is too large, which is not conducive to the application of fine structure analysis and biological cell experiments

(2) When the ion beam passes through the exit window film, there will be serious energy dissipation and large angular divergence, and it is impossible to extract the low- and medium-energy ion beam (keV level), which will affect the beam quality

For example, the current method of using Kapton, Si3N4 or Mylar exit window film to extract the ion beam, because the ion beam interacts with the window film material when passing through the exit window film, causes serious energy divergence and angular divergence of the ion beam, which is not conducive to ion beam extraction. Beam quality control, and the application of external beams in the fields of physics, chemistry, materials, and biomedicine has higher requirements on the quality of beams

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