Laser processing control method, device, equipment and computer storage medium

Abstract

The embodiment of the invention discloses a laser processing control method, a device, equipment and a computer storage medium. The method comprises the following steps that a decoupling filter with a delay consistency property of frequency components in a passband is designed; a speed strategy of a laser beam processing track is planned based on the constraint of the light outlet aperture of a coaxial air nozzle on the scanning range of a galvanometer; according to the speed strategy, the low-pass cut-off frequency of the decoupling filter is set based on the reverse correlation between the low-pass cut-off frequency and the scanning range of the galvanometer; and the laser beam processing track is decomposed into a servo platform track and a galvanometer track which are linked by using the set optimal decoupling filter.

Description

technical field [0001] The embodiments of the present invention relate to the technical field of laser processing, and in particular to a control method, device, equipment and computer storage medium for laser processing. Background technique [0002] Because laser processing technology has the advantage of non-contact processing, it is widely used in the processing of thin and hard materials. When laser processing technology is applied to the process of processing small holes with high depth-to-diameter ratio on hard and brittle materials such as ceramic substrates, for example Laser processing of tiny holes with a diameter of 0.1mm on a ceramic substrate with a thickness of 0.3mm to 0.5mm will inevitably produce residues or plasma fluid substances in the tiny holes, thereby affecting the processing accuracy. In response to the above phenomenon, the usual measure is to cooperate with the coaxial blowing method, and the high-pressure protective gas sprayed out through the ga...

AI Technical Summary

Problems solved by technology

However, due to the linkage processing between the servo platform and the scanning galvanometer, the conventional low-pass filter decoupling algorithm decomposes to a too large trajectory range of the scanning galvanometer, combined with the aforementioned laser processing method with coaxial air blowing, resulting in During the process, the coaxial consistency between the laser scanning beam and the gas nozzle cannot be guaranteed, resulting in the phenomenon of light blocking interference between the coaxial gas nozzle and the scanning area

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