An ultra-large-angle electromagnetically driven micromirror

Abstract

The invention discloses an ultra-large-angle electromagnetically driven micromirror, which relates to the technical field of microelectromechanical systems, including a micromirror and a new type of magnet structure arranged on both sides of the micromirror, a driving coil and an anchor point. The micromirror passes through two symmetrical torsion beams One side of the anchor point is respectively connected, and the other side of the anchor point is connected to the silicon substrate of the micromirror through a torsion beam. The anchor point is used to fix the micromirror; The structure is arranged around the drive coil to generate a radial magnetic field tangent to the motion track of the drive coil; when the drive coil is connected to an external power supply, the direction of the torsional moment acting on the silicon substrate is the same, and the torsional moment transmitted by the micromirror through the silicon substrate is in the form of a torsion The beam deflects for the axis. This structure can obtain a larger deflection angle under a small current, which reduces power; and the magnetic field strength remains unchanged during deflection, and the electromagnetic force of the driving coil is only along the direction of the torsional torque, and has a linear relationship with the driving current, with high controllability.

Description

technical field [0001] The invention relates to the technical field of microelectromechanical systems, in particular to a super-large-angle electromagnetically driven micromirror. Background technique [0002] Electromagnetic micromirror is a light reflective device developed by MEMS technology. Electromagnetic micromirror is a kind of micromirror that drives the mirror deflection through the twisting structure under the action of electromagnetic force and changes the reflected light path. It can control the size of the current and The frequency is used to control the deflection angle and frequency of the micromirror. [0003] A simple schematic diagram of an existing electromagnetically driven micromirror is shown in figure 1 As shown, firstly, the magnetic field generated by the parallel permanent magnet 1 in space is distributed approximately horizontally, and the driving coil 2 deflects under the action of electromagnetic force between the two permanent magnets. With th...

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Problems solved by technology

like figure 2 In the lens beam expansion method shown, the light beam is reflected by the micromirror 4 and then passes through the lens 3, which will cause energy loss, and the resolution accuracy after beam expansion will also decrease.

like image 3 In the shown multi-electromagnetic micromirror splicing method, the micromirrors 5a, 5b, and 5c require large volume and high power consumption, such as image 3 The overlay of the field of view indicated by the shadow needs to be cropped, stitched and fused, and the difficulty in driving and algorithm will be greatly improved due to the stitching method

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