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Sintered body

A technology of sintered body and crystal structure, applied in the direction of non-metallic conductors, oxide conductors, vacuum evaporation plating, etc., can solve the problems of complicated manufacturing steps, color deviation, material waste, etc., to reduce abnormal discharge and suppress color deviation Effect

Pending Publication Date: 2021-06-04
IDEMITSU KOSAN CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the chipped material is wasted, and furthermore, there is a problem that an additional step for grinding is required
[0006] Even if the color deviation is removed, there is a problem that the color deviation is likely to occur again at the erosion part and the peripheral part due to sputtering
[0007] In this way, there is a problem of complicating the manufacturing process and increasing the manufacturing cost due to the occurrence of color deviation

Method used

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  • Sintered body
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1~5

[0056] Embodiment 1~5, comparative example 1, 2

[0057] (A) Production of sintered body

[0058] Zinc oxide (ZnO) powder with an average particle size of 1 μm or less and magnesium oxide (MgO) powder with an average particle size of 1 μm or less were weighed and mixed so that the atomic ratio of Mg to Zn became the value shown in Table 1. Put the mixed powder into a resin pot, add water, and use hard ZrO as a crushing medium 2 Balls were mixed for 20 hours with a wet ball mill. The resulting mixed slurry was taken out, filtered, dried and pelletized. The obtained granulate is added to the mold, and pressurized by cold isostatic pressing to 3 ton / cm 2 Pressurize to form.

[0059] Next, the obtained compact was placed in a sintering furnace. With an average of 0.1m 3 Oxygen was flowed in at a rate of 5 L / min in the furnace volume, and the molded body was calcined at the same time.

[0060] The temperature in the sintering furnace was raised from room temperature to 1000°...

Embodiment 1

[0096] The X-ray diffraction patterns of the sintered bodies produced in Example 1, Comparative Examples 1 and 2 are shown in figure 2 .

[0097] The sintered body of Example 1 is based on figure 1 The image of EPMA can be considered to consist of a single crystal structure (cubic crystal of MgO) in which ZnO is dissolved in MgO. The same applies to Examples 2 to 5.

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Abstract

A sintered body contains zinc, magnesium and oxygen as constituting elements, wherein the atomic ratio of zinc to the sum of zinc and magnesium [Zn / (Zn+Mg)] is 0.20-0.75; the atomic ratio of magnesium to the sum of zinc and magnesium [Mg / (Zn+Mg)] is 0.25-0.80; and the result of X-ray diffractometry indicates the presence of a single crystal structure.

Description

technical field [0001] The present invention relates to a film-forming sheet and a sputtering target used for forming a sintered body and a thin film. Background technique [0002] An oxide thin film is used as the light-transmitting thin film. Oxide thin films are used, for example, as electrodes of semiconductor devices such as light emitting diodes. [0003] Among MgO—ZnO-based oxides, there are examples of application to color liquid crystal projectors as light-transmitting ceramics (for example, refer to Patent Document 1). In addition, a sintered body for a ZnO-MgO-based sputtering target is disclosed, which is characterized in that Mg is contained in an amount of 3 to 50 mol % in terms of MgO, and the maximum crystal grain size of the MgO phase (including a MgO-rich solid solution phase) is Below 10 μm, it has a uniformly dispersed structure (see Patent Document 2). In this document, the resulting films are used as window materials for solar cells. [0004] Howeve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/453C04B35/053C23C14/34
CPCC04B35/453C04B35/053C04B2235/3284C04B2235/3206C04B2235/762C04B2235/5445C04B2235/6567C04B2235/6584C04B2235/6585C04B2235/77C04B2235/9661C04B2235/6586C04B2235/6562C04B2235/6565C04B2235/662C23C14/3414C23C14/34C04B2235/76H01B1/08
Inventor 笘井重和上冈义弘胜又聪佐佐木健一大山正嗣
Owner IDEMITSU KOSAN CO LTD