A cooling system for a crystal growth furnace

Abstract

The application discloses a cooling system for a crystal growth furnace, which includes a cooling medium channel, a filter device, a storage device and a control unit. One end of the cooling medium channel penetrates into the crystal growth furnace body, and the filter device and the crystal growth furnace The cooling medium channel on the outside of the body is connected and arranged, and the filter unit is provided on the flow channel included in the filter device. After the cooling medium flows through the filter unit, the cooling medium is provided to the inside of the crystal growth furnace body; the storage device is provided with a spare filter unit; The crystal furnace also includes a controlled replacement device and a monitoring unit. The monitoring unit monitors the flow of cooling medium flowing into the crystal growth furnace body and provides monitoring information to the control unit. The controlled replacement device is controlled by the control unit. When the value is fixed, the controlled replacement device replaces the filter unit on the flow channel with the spare filter unit. The cooling system of the crystal growth furnace disclosed in this application has the advantages of real-time monitoring, automatic troubleshooting, and ensuring safe and stable operation of the crystal growth furnace.

Description

technical field [0001] The application belongs to the technical field of crystal growth industry, and in particular relates to a cooling system of a crystal growth furnace. Background technique [0002] As we all know, silicon carbide is one of the important third-generation semiconductor materials. It is widely used in power electronics, radio frequency devices, Optoelectronic devices and other fields. [0003] In the production process of silicon carbide, in order to obtain a certain quality product, the environment in the crystal growth furnace must be accurately monitored and controlled. The temperature control has an important impact on the crystal growth process of the crystal growth furnace, so the crystal growth furnace needs to be equipped with a cooling system. However, although the cooling medium of the cooling system installed in the crystal growth furnace has been purified, the cooling medium channel will inevitably enter the granular Impurities will cause blo...

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Problems solved by technology

The temperature control has an important impact on the crystal growth process of the crystal growth furnace, so the crystal growth furnace needs to be equipped with a cooling system. However, although the cooling medium of the cooling system installed in the crystal growth furnace has been purified, the cooling medium channel will inevitably enter the granular Impurities can cause blockage, which will lead to abnormal cooling medium flow, which will have a great impact on the growth of silicon carbide crystals, and even cause safety accidents in severe cases.

[0004] In addition, there are many crystal growth furnaces in the factory, and it is difficult for a small number of workers to implement global monitoring. If the water cooling system of the crystal growth furnace fails and cannot be dealt with in time, it will definitely have a serious impact on the production of silicon carbide; A crystal growth furnace with the advantages of full monitoring and automatic troubleshooting of the cooling system of the crystal growth furnace during the crystal growth process will be of great significance

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