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Dual-wavelength common-path digital holographic microscopy device based on reflective measurement and measurement method

A digital holographic microscope and dual-wavelength technology, applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of weak anti-interference ability and practical limitation, and achieve the effect of strong anti-interference ability and compact structure

Pending Publication Date: 2021-06-18
XINYU UNIV +1
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Problems solved by technology

However, since the three-dimensional shape measurement method based on digital holographic microscopy technology is mainly used in micro-nano-scale measurement fields such as micro-electromechanical systems and biological cells, the measurement system is very sensitive to environmental vibration and air disturbance, and its ability to resist environmental interference is weak. sex is restricted

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  • Dual-wavelength common-path digital holographic microscopy device based on reflective measurement and measurement method
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  • Dual-wavelength common-path digital holographic microscopy device based on reflective measurement and measurement method

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Embodiment Construction

[0042] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention. It should be noted that the terms "first" and "second" in the description and claims of the present invention and the above drawings are used to distinguish similar objects, but not necessarily used to describe a specific sequence or sequence. It is to be understood that the data so used are interchangeable under appropriate circumsta...

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Abstract

The invention discloses a dual-wavelength common-path digital holographic microscopy device and a measurement method, which belong to the field of optical interference detection. The device comprises a laser, an adjustable neutral density optical filter, a beam expanding collimating lens, a cubic prism, an achromatic lens, a microscope objective, an object to be measured, an objective table, a pinhole filter, a camera and a computer. In the dual-wavelength common-path digital holographic microscopy device provided by the invention, the object light and the reference light come from the same light path and interfere with each other on the camera, and phase information is obtained by solving interference fringes. The measuring device is strong in anti-interference capability, low in sensitivity to environmental vibration, and very high in flexibility and stability. The device is suitable for real-time detection of the three-dimensional morphology of reflective samples such as micro-nano devices with complex discontinuous characteristics.

Description

technical field [0001] The invention belongs to the field of optical interference measurement, and in particular relates to a dual-wavelength common-optical path digital holographic microscopic device and a measurement method based on reflection measurement. Background technique [0002] The three-dimensional shape measurement of objects plays an important role in the fields of industrial online monitoring and biomedicine, and has high practical value. The three-dimensional shape measurement of objects is mainly divided into contact measurement and non-contact measurement. Contact measurement is mainly a probe-type scanning measurement represented by a three-coordinate measuring instrument, but this method has a slow measurement speed and limited scope of application. Non-contact measurement methods such as optical triangulation, Moire fringe method, digital holography, etc., these methods can effectively overcome the shortcomings of contact measurement. Among them, the di...

Claims

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Application Information

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IPC IPC(8): G01B11/24G03H1/00G03H1/04
CPCG01B11/2441G03H1/0005G03H1/0443G03H1/0486G03H2001/0038G03H2001/005G03H2001/0452
Inventor 贾书海于洪强徐顺建张宝
Owner XINYU UNIV
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