Local large surface shape error intelligent compensation interference detection system and method

Abstract

The invention discloses a local large surface shape error intelligent compensation interference detection system and method, and the system comprises a wave surface interferometer, a standard lens, a static compensator, a self-adaptive optical element, and a to-be-detected surface, and the wave surface interferometer is provided with the standard lens; the static compensator and the self-adaptive optical element are sequentially arranged between the standard lens and the to-be-detected surface, the wave surface interferometer is connected with a far-field light intensity data reading device, and the far-field light intensity data reading device reads a far-field light intensity image acquired by the wave surface interferometer and inputs the far-field light intensity image into a controller; the controller predicts and outputs a speculation value of a surface shape large-error mode aberration fitting coefficient according to the far-field light intensity image; and a self-adaptive optical element aberration control module generates a driving signal of the self-adaptive optical element according to the speculated value of the surface shape large error mode aberration fitting coefficient of the to-be-detected surface, and drives the self-adaptive optical element to generate compensation aberration, thereby realizing intelligent compensation detection of the surface shape large error of the to-be-detected surface. The machining efficiency of a complex optical surface shape is improved.

Description

technical field [0001] The invention belongs to the technical field of optical surface shape detection, and in particular relates to an interference detection system and method for intelligent compensation of local large surface shape errors. Background technique [0002] The processing of optical parts generally goes through several stages of milling, grinding, and polishing. The grinding stage is the key to determining whether the entire processing can be efficiently converged to high precision. However, the certainty of grinding is far less than that of polishing, especially the local curvature changes of complex optical surfaces make it difficult for the grinding disc to fit the surface to be processed, and it is prone to large local errors, such as common edge collapse or warping , and local pits or protrusions, the corresponding error gradient is too large, resulting in too dense or even invisible interference fringes, far beyond the Nyquist sampling frequency of the d...

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Problems solved by technology

However, the calibration of the deflection measurement system itself is also very difficult. The accuracy of the entire interferometry system is limited by the accuracy of the deflection measurement system and the number of drivers. poor form

[0007] In summary, in terms of realizing local large error analysis, existing detection methods cannot be realized based on commercial wavefront interferometers, the detection device has complex structure, high cost, and low detection resolution or detection accuracy

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