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A thin film sensor for detecting gear dynamic meshing force and its application method

A technology for detecting thin film and meshing force, applied in force/torque/work measuring instrument, measurement of property force using piezoelectric devices, instruments, etc. problems such as force, to achieve the effect of simple preparation process, guaranteed performance, and easy control of operation

Active Publication Date: 2022-04-22
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the monitoring and fault diagnosis of the gear meshing force is to use the vibration sensor to collect the vibration signal when the mechanical equipment is running. There is no direct measurement device. It extracts the characteristic signal through different analysis methods, but its algorithm is complex and changeable. It is difficult to obtain real and effective dynamic meshing force of gears in practice

Method used

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  • A thin film sensor for detecting gear dynamic meshing force and its application method
  • A thin film sensor for detecting gear dynamic meshing force and its application method
  • A thin film sensor for detecting gear dynamic meshing force and its application method

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preparation example Construction

[0044] A kind of magnetron sputtering MoS based on the embodiment of the present invention 2 The preparation method of the gear dynamic meshing force detection film sensor comprises the following steps:

[0045] Evenly sputter insulating material on the gear and gear shaft to form an insulating layer;

[0046] Using hard masking on the insulating layer, patterned electrodes and MoS were prepared by magnetron sputtering 2 piezoresistive film;

[0047] Wherein, the electrode and the MoS 2 piezoresistive thin film contacts, the MoS 2 The piezoresistive film contacts the pressure-sensitive element that makes up the sensor. Fabrication of Electrodes and MoS on Gear Substrates by Magnetron Sputtering Process Using Hard Masking 2 Pressure sensitive film.

[0048] The invention discloses a method based on magnetron sputtering MoS 2 The preparation method of the thin-film sensor for detecting the dynamic meshing force of gears; the prepared thin-film sensor for detecting the dyn...

specific Embodiment 1

[0050] A kind of magnetron sputtering MoS based on the embodiment of the present invention 2 The thin-film sensor for detecting the dynamic meshing force of gears includes: a gear tooth base; an insulating layer 2 is sprayed on the surface of the gear tooth base; tooth electrodes 3 and sensitive electrodes 3 are sputtered on the insulating layer 2 through hard masking on the side surfaces and meshing surfaces of the gear teeth. The surface of the element, the sensitive element and the tooth electrode 3 is sprayed with a protective layer 5, and the protective layer 5 covers all MoS 2 Piezoresistive film and electrodes prevent wear when tooth surfaces mesh. Wherein, the piezoresistive film prepared by magnetron sputtering constitutes the piezoresistive sensitive element of the sensor.

specific Embodiment 2

[0052] A kind of magnetron sputtering MoS based on the embodiment of the present invention 2 The gear dynamic meshing force detection thin film sensor also includes: gear shaft 6, the surface of the gear shaft 6 is evenly covered with an insulating layer 2, and the shaft electrodes 7 are evenly distributed on the shaft surfaces on both sides of the gear, extending to both ends of the shaft, and connected to the circuit The board 8 is connected by welding with the wire 9 .

[0053] The MoS prepared based on the magnetron sputtering process of the present invention 2 Thin film sensor for gear dynamic meshing force detection, MoS 2 The film has good piezoresistive effect, and the piezoresistive film prepared by magnetron sputtering process can realize patterning and miniaturization by using hard masking. The magnetron sputtering MoS based 2 The thin film sensor for gear dynamic meshing force detection has the characteristics of ultra-thin, fast response, and ultra-sensitivity....

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Abstract

The invention discloses a thin film sensor for detecting dynamic meshing force of gears and an application method thereof. The thin film sensor for detecting dynamic meshing force of gears comprises: an insulating layer, which is used to be arranged on the surface of a gear base body; electrodes, which are sputtered on the insulating layer. Surface; electrodes include tooth electrodes and shaft electrodes, and the tooth electrodes and shaft electrodes are electrically connected by wires; pressure sensitive elements, including: MoS 2 piezoresistive films; among them, MoS 2 The piezoresistive film is a bow structure, MoS 2 The piezoresistive film is sputtered on the surface of the insulating layer of the tooth meshing tooth surface; MoS 2 The piezoresistive film is electrically connected to the tooth electrodes. The gear dynamic meshing force detection film sensor of the present invention, in the process of gear meshing, the piezoresistive film is strained by the stress, the resistance changes regularly, the output performance is stable, and it has the advantages of integration, ultra-thin type, fast response, ultra-sensitivity, etc. , which can monitor the health status of the gear in real time.

Description

technical field [0001] The invention belongs to the technical field of sensors and relates to magnetron sputtering MoS 2 field, in particular to a gear dynamic meshing force detection film sensor and an application method thereof. Background technique [0002] Gear transmission is the most common transmission mode in mechanical equipment. It has a stable transmission ratio, high transmission efficiency, reliable working performance, and long service life. At the same time, the gear transmission generates dynamic load, vibration and noise during operation. The problem is prominent, and overload protection cannot be realized, which brings hidden dangers to the safety of equipment operation. [0003] In order to ensure the safe and efficient operation of the equipment, through the detection of the dynamic meshing force of the gears, the online monitoring and fault diagnosis of the gear meshing can be realized. At present, the monitoring and fault diagnosis of the gear meshing...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/16G01L5/00G01M13/021
CPCG01L1/16G01L5/00G01M13/021
Inventor 张琪庞星赵星越赵玉龙
Owner XI AN JIAOTONG UNIV