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A hollow two-dimensional piezoelectric inertial impact drive platform

A driving platform, electric inertia technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the problem of friction coupling stability, unable to provide observation aperture and other problems , to achieve the effect of improving accuracy and structural stability

Active Publication Date: 2022-02-18
HEFEI UNIV OF TECH
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

The Chinese patent with the publication number CN110336485B adopts the principle of friction impact drive to increase the motion stroke of the piezoelectric flexible hinge platform to tens of millimeters, but this design cannot provide the observation aperture, and the friction coupling has stability problems

Method used

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  • A hollow two-dimensional piezoelectric inertial impact drive platform
  • A hollow two-dimensional piezoelectric inertial impact drive platform
  • A hollow two-dimensional piezoelectric inertial impact drive platform

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Embodiment Construction

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0021] Such as figure 1 , 2 As shown, a hollow two-dimensional piezoelectric inertial impact drive platform includes a square platform 1, a package cover 2 and a fixed base 3; the square platform 1 is composed of a square outer frame 4, a square inner frame 5, a displacement amplification mechanism 6 and The piezoelectric driver 7 is composed; the center of the package cover 2 is hollowed out and installed on the upper surface of the square platform 1; the center ...

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Abstract

The invention discloses a hollow two-dimensional piezoelectric inertial impact drive platform, which includes a square platform, a package cover and a fixed base. The square platform is composed of a square outer frame, a square inner frame, a displacement amplification mechanism and a piezoelectric driver. The package cover is set The flexible mechanism is installed on the upper surface of the square platform, and the square platform is frictionally coupled with the fixed base on the lower surface through the four corners of the square outer frame, and realizes inertial impact motion under the sawtooth wave excitation voltage of the piezoelectric driver. The invention adopts a central hollow structure design to provide an observation aperture, and adopts a frictional coupling adjustment mechanism to ensure the stability of the impact drive, which can further improve the application effect of multi-degree-of-freedom cross-scale precision drive positioning in microscopic imaging systems such as SEM.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric precision positioning platform equipment, and in particular relates to a hollow two-dimensional piezoelectric inertial impact drive platform. Background technique [0002] With the rapid development of nanotechnology, more and more occasions require nanoscale observation and manipulation of tiny materials, devices, tissues, etc., so as to analyze and study the mechanical, electrical, biochemical and other characteristics of samples and assist the synthesis and assembly of samples. , These observation and manipulation devices include scanning electron microscopes (SEM), fluorescence microscopes, atomic force microscopes (AFM), nanomanipulators, etc. When using nanomanipulators, AFM and other equipment for nanomanipulation, it is often necessary to use SEM and other equipment for real-time image feedback. In these occasions, precision positioning platforms are required to have observation aper...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/00H02N2/04
CPCH02N2/04H02N2/043H02N2/0065
Inventor 潘成亮胡民港夏豪杰李维诗于连栋石超丰安辉吴家豪
Owner HEFEI UNIV OF TECH
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