Thin film metal oxide structure and manufacturing method thereof
A thin-film metal and oxide technology, applied in metal material coating process, liquid chemical plating, coating, etc., can solve problems affecting device performance, stability and efficiency, and difficulty in obtaining high-quality metal oxide films. Achieve the effect of good weight and stable use
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[0020] Next, the technical solutions in the embodiments of the present invention will be apparent from the embodiment of the present invention, and it is clearly described, and it is understood that the described embodiments are merely embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, there are all other embodiments obtained without making creative labor without making creative labor premises.
[0021] A thin film metal oxide structure comprising substrate 1 and a metal oxide film 2 disposed on substrate 1;
[0022] The substrate 1 is a single crystal silicon substrate;
[0023] The metal oxide film 2 is made of a metal oxide sol;
[0024] Among them, the oxide in the metal oxide film 2 is a trioxide or aluminum;
[0025] Among them, the oxide film 2 in the metal oxide film can also be copper oxide or iron oxide, etc., which can be set according to the actual needs;
[0026] The metal oxide film 2 has a thickness o...
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