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Semiconductor waste gas treatment device and method

A waste gas treatment device and semiconductor technology, which is applied in the direction of combustion method, combustion type, lighting and heating equipment, etc., can solve the problems of single combustion mode and low waste gas treatment efficiency, and achieve the effect of improving treatment efficiency and ensuring full combustion

Active Publication Date: 2021-06-29
BEIJING JINGYI AUTOMATION EQUIP CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention provides a semiconductor waste gas treatment device and treatment method to solve the problems of single combustion mode and low waste gas treatment efficiency in the waste gas treatment device in the prior art

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  • Semiconductor waste gas treatment device and method
  • Semiconductor waste gas treatment device and method
  • Semiconductor waste gas treatment device and method

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Embodiment Construction

[0031] Embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but should not be used to limit the scope of the present invention.

[0032] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right" , "vertical", "horizontal", "top", "bottom", "inner", "outer" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing this The embodiments and simplified descriptions of the invention do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be construed a...

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Abstract

The invention provides a semiconductor waste gas treatment device and method. The semiconductor waste gas treatment device comprises a waste gas treatment device, a combustible gas conveying pipeline, an oxygen conveying pipeline and a process waste gas conveying pipeline, the combustible gas conveying pipeline communicates with a combustor, and a first mass flow controller is arranged on the combustible gas conveying pipeline. The oxygen conveying pipeline communicates with the combustor; the oxygen conveying pipeline is provided with a second mass flow controller. The process waste gas conveying pipeline communicates with a gas inlet of the waste gas treatment device, and the process waste gas conveying pipeline is provided with a first gas analyzer. The components of the process waste gas are analyzed through the first gas analyzer, the usage amount of combustible gas and oxygen needed for processing the process waste gas is calculated according to the flow and the initial temperature, the flow of the combustible gas and the flow of the oxygen are accurately controlled through the first mass flow controller and the second mass flow controller respectively, and it is ensured that the process waste gas is fully combusted, and the treatment efficiency of the waste gas treatment device is improved.

Description

technical field [0001] The invention relates to the technical field of waste gas treatment, in particular to a semiconductor waste gas treatment device and treatment method. Background technique [0002] Raw materials in semiconductor manufacturing, LCD panel manufacturing, LED, solar energy and other industries contain a variety of flammable, explosive, toxic and harmful gases, which are harmful to the environment or human body, and must be prevented from being directly discharged into the atmosphere. Therefore, the general production line will be equipped with a large-scale central exhaust gas treatment system. However, this system only uses water to wash the waste gas, so its application range is limited to the treatment of water-soluble gases, and it cannot adapt to the ever-changing industrial waste gas from the production line with fine division of labor. And because the working area is far away from the central exhaust gas treatment system, the pipeline is often bloc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F23G7/06
CPCF23G7/06F23G2209/14
Inventor 杨春涛杨春水张坤蔡传涛席涛涛宁腾飞王继飞闫潇章文军陈彦岗
Owner BEIJING JINGYI AUTOMATION EQUIP CO LTD