Method for acquiring low-LET-value heavy ion single event upset cross section
A technology of single-particle flipping and heavy ions, which is applied in X-ray energy spectrum distribution measurement and other directions, can solve problems not involved in obtaining heavy ion single-particle flipping sections, and achieve lower experimental difficulty, reduced dependence, and reduced damage.
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[0047] Taking a certain static random access memory as an example, a specific embodiment is further described in detail in conjunction with the accompanying drawings. It should be understood that the following embodiment is only used to illustrate the present invention, but not to limit the scope of the present invention.
[0048] figure 1 It is a flow chart of a method for obtaining low LET value heavy ion single particle flip cross-section based on device low-energy proton experimental data of the present invention, combined with figure 1 , to describe the steps of the method in detail.
[0049] S1] Conduct longitudinal analysis of the device or communicate with the device developer to obtain information on multi-layer metal wiring layers above the sensitive area of the device, including the thickness and material of each layer and the thickness of STI, see figure 2 .
[0050] S2] Based on the mastery of device information, a 10 MeV low-energy proton accelerator was sel...
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