A High Quality Factor Thin Film Bulk Acoustic Resonator
A technology of thin-film bulk acoustic wave and high quality factor, applied in the direction of impedance network, electrical components, etc., can solve the problems of resonator quality factor damage, acoustic energy leakage, etc., achieve high Q value, improve structural strength, and improve the effect of quality factor
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Embodiment 1
[0026] Example 1. combine Figure 2A and Figure 2B , the basic structure of a high quality factor thin film bulk acoustic wave resonator proposed by the present invention includes a substrate 1 with a groove 2 on the upper surface, a bottom electrode layer 3 located above the substrate 1, a piezoelectric layer 4, a belt There is a top electrode layer 5 with an air bridge structure 6, wherein the air bridge structure 6 is provided with an acoustic rebound structure 7 that can rebound the transverse acoustic wave and improve the quality factor of the thin-film bulk acoustic wave resonator; the air bridge The boundary of one direction of the structure 6 is located inside the groove 2, and the boundary of the other direction extends beyond the boundary of the groove 2; the upper and lower ends of the acoustic rebound structure 7 are respectively connected with the piezoelectric layer 4 and the air bridge structure. 6 close to each other to form an acoustic impedance mismatch in...
Embodiment 2
[0042] Example 2. Taking a specific 2.6GHz thin-film bulk acoustic resonator as an example, the above structures are verified and analyzed through the simulation design results to analyze the actual effect of the present invention on improving the Q value of the thin-film bulk acoustic resonator.
[0043] image 3 It is a schematic diagram of the performance test parameters of the thin film bulk acoustic wave resonator without the air bridge structure. Figure 4 It is a schematic diagram of the performance test parameters of the thin film bulk acoustic wave resonator with the air bridge structure. Figure 5 It is a schematic diagram of the performance test parameters of the basic structure of a film bulk acoustic wave resonator with high quality factor proposed by the present invention. exist image 3 In the simulation design result of the thin film bulk acoustic wave resonator without the air bridge structure shown, the Q value of the thin film bulk acoustic wave resonator...
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