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Graphite boat saturation process

A graphite boat and process technology, applied in the field of solar cells, can solve the problems of increasing the number of color difference sheets, restricting production capacity and efficiency, and restricting the saturation effect of graphite boats, so as to achieve the effect of increasing service life and good uniformity

Inactive Publication Date: 2021-07-20
江苏润阳世纪光伏科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The saturation effect of the graphite boat affects the coating effect of the tubular PECVD to a considerable extent.
The quality of the saturation process determines the state of the graphite boat, and the poor state of the graphite boat will lead to an increase in the color difference film, which seriously restricts the production capacity and benefits
In the prior art, the saturation process of the graphite boat is saturated under the reaction of silane and ammonia for 3 hours. The graphite boat is not effectively treated before and after saturation, and impurities are likely to remain at the stuck point, which seriously restricts the saturation effect of the graphite boat and state after saturation

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] A graphite boat saturation process, the process comprises the steps in turn:

[0033] (1) Remove the silicon nitride on the surface of the old graphite boat and the stuck point: use 20wt% hydrofluoric acid (HF) to clean and remove the silicon nitride on the surface of the graphite boat and the stuck point;

[0034] (2) washing: use pure water to rinse the graphite boat for 3 times, and rinse for 2 hours each time to remove the hydrofluoric acid residue on the graphite boat;

[0035] (3) Slow pulling: use 40°C hot water to pre-dehydrate the surface of the graphite boat;

[0036] (4) Gradient drying: In the drying tank, a large amount of airflow at 70°C is introduced to pre-dry the surface of the graphite boat, and then the graphite boat is placed in an oven, and then a large amount of airflow at 140°C is introduced. High-temperature airflow for thorough drying;

[0037] (5) Saturated furnace tube treatment: preheat the furnace tube to 400°C, and use 20000 sccm of CDA t...

Embodiment 2

[0046] A graphite boat saturation process, the process comprises the steps in turn:

[0047] (1) Remove the silicon nitride on the surface of the old graphite boat and the stuck point: use 20wt% hydrofluoric acid (HF) to clean and remove the silicon nitride on the surface of the graphite boat and the stuck point;

[0048] (2) Washing: use pure water to rinse the graphite boat 5 times, and rinse for 1 hour each time to remove the hydrofluoric acid residue on the graphite boat;

[0049] (3) Slow pulling: use 60°C hot water to pre-dehydrate the surface of the graphite boat;

[0050] (4) Gradient drying: In the drying tank, a large amount of 60°C airflow is introduced to pre-dry the surface of the graphite boat, and then the graphite boat is placed in the oven, and then a large amount of 160°C airflow is introduced into the drying tank. High-temperature airflow for thorough drying;

[0051] (5) Saturated furnace tube treatment: preheat the furnace tube to 430°C, and use 18000 sc...

Embodiment 3

[0060] A graphite boat saturation process, the process comprises the steps in turn:

[0061] (1) Remove the silicon nitride on the surface of the old graphite boat and the stuck point: use 25wt% hydrofluoric acid (HF) to clean and remove the silicon nitride on the surface of the graphite boat and the stuck point;

[0062] (2) Washing: use pure water to rinse the graphite boat for 4 times, and rinse for 3 hours each time to remove the hydrofluoric acid residue on the graphite boat;

[0063] (3) Slow pulling: use 50°C hot water to pre-dehydrate the surface of the graphite boat;

[0064] (4) Gradient drying: In the drying tank, a large amount of airflow at 90°C is introduced to pre-dry the surface of the graphite boat, and then the graphite boat is placed in the oven, and then a large amount of airflow at 120°C is passed through. High-temperature airflow for thorough drying;

[0065] (5) Saturated furnace tube treatment: Preheat the furnace tube to 450° C., and use 19000 sccm o...

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PUM

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Abstract

The invention discloses a graphite boat saturation process. The graphite boat saturation process comprises the following steps of (1) removing silicon nitride on the surface of a graphite boat by hydrofluoric acid; (2) rinsing the graphite boat with pure water; (3) pre-dehydrating the surface of the graphite boat by using hot water; (4) introducing low-temperature airflow into a drying tank to pre-dry the graphite boat, and then introducing high-temperature airflow to thoroughly dry the graphite boat; (5) heating and preheating a furnace tube, purging the saturated furnace tube by using CDA, placing the graphite boat to be saturated in the furnace tube, and closing a furnace door; (6) continuously heating the furnace tube, and introducing nitrogen; (7) vacuumizing the furnace tube, testing the leak rate of the furnace tube, and vacuumizing after leak detection; (8) introducing ammonia gas, opening radio frequency power, and carrying out primary pretreatment on the graphite boat; (9) introducing ammonia gas and silane, turning on a radio frequency power supply, and performing saturation treatment on the surface of the graphite boat by using PECVD; (10) introducing ammonia gas, turning on a radio frequency power supply, and carrying out post-treatment on the graphite boat; (11) vacuumizing, and introducing nitrogen to restore the furnace tube to normal pressure; and (12) taking out the saturated graphite boat.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a graphite boat saturation process. Background technique [0002] With the development of society, energy has become two unavoidable topics. As one of the most important energy sources at present, solar cells, its important process PECVD (Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical vapor deposition method) is silicon An indispensable part of the solar cell manufacturing process, with the continuous improvement of PECVD technology, tubular PECVD has significantly improved the efficiency of solar cells. The saturation effect of the graphite boat affects the coating effect of the tubular PECVD to a considerable extent. The quality of the saturation process determines the state of the graphite boat, and the poor state of the graphite boat will lead to an increase in the color difference film, which seriously restricts the production capacity and efficienc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/02C23C16/34C23C16/505H01L21/673H01L31/18
CPCC23C16/0227C23C16/345C23C16/505H01L21/673H01L31/18Y02P70/50
Inventor 邢显邦李海波
Owner 江苏润阳世纪光伏科技有限公司
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