Microminiature two-degree-of-freedom ultrasonic motor and driving method thereof

Abstract

The invention relates to a microminiature two-degree-of-freedom ultrasonic motor and a driving method thereof. The microminiature two-degree-of-freedom ultrasonic motor comprises a base, an x-axis movement unit, a y-axis movement unit and an objective table. The x-axis movement unit is fixedly connected to the base, and the y-axis movement unit is fixedly connected to a driven part of the x-axis movement unit. the objective table is fixedly connected to a driven piece of the y-axis movement unit. The driving method is as follows: the movement of the x-axis movement unit and the movement of the y-axis movement unit are mutually independent, the driving method is consistent, and sawtooth waves can be synthesized on the x axis and the y axis respectively by controlling ultrasonic excitation signals of piezoelectric stacks of the x-axis movement unit and the y-axis movement unit, so that independent movement of the two axes is generated. The motor has the advantages that the device is miniaturized in structure, simple in driving method, high in speed, high in precision, low in cost and easy to integrate, can be used as a built-in camera anti-shake device of a mobile phone, and has a wide application prospect in use occasions with limited application space, such as miniature equipment.

Description

Technical field [0001] The present invention relates to the field of microtic motor technology, and more particularly to a small two-degree-of-degree-of-degree ultrasonic motor and a driving method thereof. The ultrasonic motor is simple, small size, large output force, and simple driving method. Suitable for tiny space Precision positioning and driving. Background technique [0002] Ultrasonic motor has a wide range of applications in aerospace engineering, optical engineering, precision instruments, etc. due to low speed large torque, low noise, fast response, not electromagnetic interference, and is widely used in aerospace engineering, optical engineering, precision instruments and other fields. The ceramic sheet has a flexible advantage, often serving as a source of micro-ultrasonic motor, but the piezoelectric ceramic sheet is based on the D31 mode of electromechanical coupling efficiency, and the output capability is limited; and the current ultrasonic motor is based on ul...

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Problems solved by technology

[0002] Ultrasonic motors have been widely used in aerospace engineering, optical engineering, precision instruments and other fields due to their characteristics of low speed, high torque, low noise, fast response, and no electromagnetic interference. For miniaturized ultrasonic motors, piezoelectric Ceramic sheets have the advantage of flexible design and are often used as the driving source of micro-ultrasonic motors. However, piez

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