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Preprocessing device and method for demodulation of dual-frequency laser interference measurement signal

A dual-frequency laser interference and signal measurement technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems that laser errors cannot be completely offset, time is not synchronized, etc.

Inactive Publication Date: 2021-08-20
GUILIN UNIV OF ELECTRONIC TECH
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Problems solved by technology

However, the process of signal phase shifting will cause phase delay and time delay, so that the reference signal after phase shifting is not synchronized with the current measurement signal time, resulting in the inability to completely offset the error of the laser itself

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  • Preprocessing device and method for demodulation of dual-frequency laser interference measurement signal
  • Preprocessing device and method for demodulation of dual-frequency laser interference measurement signal
  • Preprocessing device and method for demodulation of dual-frequency laser interference measurement signal

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Embodiment Construction

[0043] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Apparently, the described embodiments are some application embodiments of the present invention, and are not intended to limit the applicable scope of the present invention. The change or adjustment of the embodiment should also be regarded as the implementable scope of the present invention without substantive change of the technical content.

[0044] Before introducing the present invention in detail, the principle of the laser interferometer signal demodulation algorithm is introduced first.

[0045] Please refer to figure 2 , figure 2 A schematic diagram of the demodulation algorithm of the dual-frequency laser interferometry signal is given.

[0046] Taki...

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Abstract

The invention provides a preprocessing device and method for demodulation of a dual-frequency laser interference measurement signal. The device comprises a photoelectric conversion module 1, a high-pass filter 2, a signal compensation module 3, a DDS signal generation module 4, analog multiplier modules 5 and 6, low-pass filter modules 7 and 8, signal compensation modules 9 and 10, analog-to-digital conversion modules 11 and 12 and an FPGA module 13. According to the method, the high-pass filter, a multiplier circuit, a low-pass filter circuit and the like which are designed by hardware are used for designing an analog operation circuit to replace a preposed digital signal processing part which consumes much resources in an FPGA demodulation algorithm to complete pre-processing of demodulation of the dual-frequency laser interference measurement signal. The method can be used for high-speed phase subdivision operation of double-frequency laser interference measurement, the requirement for the operation performance of a system can be effectively lowered, the operation speed is increased, operation delay is reduced, and the system cost is reduced.

Description

[0001] (1) Technical field [0002] The present invention relates to a pre-processing device and method for demodulation of dual-frequency laser interferometry signals, which can be used for pre-processing of interferometric signal demodulation in dual-frequency laser interferometry, and can be applied to high-speed phase fine-tuning of dual-frequency laser interferometry. Using hardware to replace the resource-consuming digital signal processing process can effectively reduce the demand for system computing performance, improve the speed of computing, and reduce the cost of the system. [0003] (2) Background technology [0004] In the fields of precision measurement and nanoscale processing, the application of laser interferometry is very extensive. With the development of technologies in these fields, the requirements for the resolution capability and measurement speed of dual-frequency laser interferometer signal measurement are constantly increasing. [0005] For the demo...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
CPCG01B9/02003G01B9/02007
Inventor 熊显名张志成张文涛杜浩曾启林徐韶华张玉婷赵正义
Owner GUILIN UNIV OF ELECTRONIC TECH