High-Q-value metasurface refractive index sensor based on connection of double semicircular ring holes
A refractive index sensor and metasurface technology, applied in the field of micro-nano optical sensing, can solve the problems of strong radiation loss and low Q value of metal structures
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[0020] The specific embodiment of the present invention is explained in detail below in conjunction with accompanying drawing: This implementation example is based on the premise of a kind of high-Q metasurface refractive index sensor based on connecting double semicircular holes proposed by the present invention. It should be known that the scope of protection of the present invention Including but not limited to this example.
[0021] figure 1 An example of a high-Q metasurface refractive index sensor based on connecting double semicircular holes is listed, including metasurface structure and transparent silicon dioxide structure substrate. It is composed of several microstructure units and two connected semicircular holes are symmetrically etched in the center of each dielectric metasurface microunit. The inner and outer circle radii of the two connected semicircular holes are both R1=170nm and R2=220nm. The material is single crystal silicon, and the periods in the XY dir...
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