Refractive index sensor based on high quality factor all-dielectric super surface and application
A refractive index sensor and high quality factor technology, applied in the field of optical sensing, can solve the problems of metal biotoxicity, low degree of control freedom, unfavorable metal structure, etc., and achieve the effect of short action distance and no ohmic loss
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[0027] The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings: The case of this embodiment is based on a refractive index sensor system based on a high quality factor all-medium metasurface proposed by the present invention, but the protection scope of the present invention is not limited The following implementation methods and cases.
[0028] Such as figure 1 As shown, a refractive index sensor system based on a high quality factor all-medium metasurface includes an optical device with a metasurface structure and a transparent substrate. The two-dimensional elliptical disk array is located on a transparent substrate. The material is crystalline silicon. The Y-direction period is 720nm, the X-direction period is 620nm, the long axis diameter of the elliptical disk structure is a=300nm, the short axis diameter is b=110nm, and the height is H=180nm, the major axis is along the Y axis, and the in-plane rotatio...
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