Multi-channel large-area high-density direct-current arc plasma source
A technology of plasma source and DC arc, applied in the field of plasma physics and applied scientific research, can solve the problem of small irradiation area
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[0024] This embodiment discloses a seven-channel DC cascaded arc plasma source, such as Figure 1-2 As shown, it includes: 7 cathodes 1, cathode holder 2, cascaded sheet unit 3 and anode 4.
[0025] Such as figure 1 with figure 2 As shown, the seven cathodes 1 are respectively fixed on the cathode holder 2, and the cathode holder also has a sealing function while fixing the cathode. The seven channels of the cathode seat have independent air intake channels for introducing working gas. The cascade sheet unit 3 is fixed between the cathode holder 2 and the anode 4 . The cascaded slice unit 3 includes a plurality of cascaded slices arranged in parallel. The cascaded sheet unit 3, the cathode seat 2, and the anode 4 all have seven round holes as discharge channels, and the surrounding six channels are respectively located at the six vertices of a regular hexagon, and the central channel is located at the center of the hexagon. Between the cathode seat and the cascading shee...
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